本論文為CMOS整合式感測陣列的研究，用電容式感測方式來感測粒子。晶片使用TSMC 0.18μm CMOS 1P6M製程，感測器是指叉式電極，會設計一個間距、大小相同的指叉電極來組成16×16感測陣列，並透過解碼器控制每一個感測電極的訊號輸出到共用電路。關於電路的部分，感測電路為雙重關連式取樣電路(Correlated Double Sampling, CDS)，並搭配緩衝器將電壓訊號輸出，期望能感測femto-farad電容之變化。
　　目標感測物有三種，包含粒徑3.5 μm的銅粉微珠、直徑10 μm的鎢製探針、粒徑2.5 μm的聚苯乙烯微珠，指叉電極會在空氣中感測前兩者目標物質，而聚苯乙烯微珠的感測會將指叉電極泡在去離子水環境中進行，因為去離子水介電常數為空氣的80倍，會放大指叉電容值，期望能在去離子水環境下看到比較大幅度的電容變化。除了這三種感測物，為了觀察指叉電容值的變化，有設計在不同pH值緩衝液環境下來量測指叉電容值。
　　指叉電極面積大小為15 μm×15 μm，透過CoventorWare模擬得到的電容值為19.28 fF，電路佈局後得到指叉電容值為23.4 fF，在量測上，空氣中平均指叉電容值為28.5 fF，去離子水中平均電容值為43.54 fF，在目標物質量測方面，可以感測到1.28 fF的電容變化。在不同pH值緩衝液的量測方面，在pH7緩衝液的平均指叉電容值為34.27 fF，指叉電容值會隨著pH值上升而增加，感測度為2.04 fF/pH (R^2=0.974)，呈現高度正相關。

This thesis presents a CMOS integrated sensing arrays for particle and pH detection. The work is designed and fabricated using the TSMC 0.18 μm CMOS technology. An interdigitated electrode serves as the sensor. A 16×16 sensing array is created by constructing interdigitated electrodes with identical spacing and size, and the decoder controls the signal output from each sensing electrode to the shared sensing circuit, which is a switched-capacitor circuit implemented based on the correlated double sampling (CDS) technique. A buffer is utilized to output the voltage signal, in the hopes of sensing the change in femto-farad capacitance.
There are three types of target sensing substances, including copper powder beads with a diameter of 3.5 μm, tungsten probes with a diameter of 10 μm, and polystyrene beads with a diameter of 2.5 μm. The interdigitated electrodes specifically detect the two former target substances in the air. The sensing of polystyrene beads be carried out by soaking the interdigital electrodes in deionized water because the dielectric constant of deionized water is 80 times higher than that of air, which amplify the value of interdigitated electrodes capacitance, and it is expected to see a relatively large change in capacitance in a deionized water environment. In addition to these three sensing objects, in order to observe the change of the interdigitated capacitance, there is a design to measure the interdigitated capacitance under different pH buffer environments.
The area of the interdigitated electrodes is 15 μm×15 μm, and the capacitance value simulated by CoventorWare is 19.28 fF. The interdigitated capacitance value after the circuit layout is 23.4 fF. The average interdigitated capacitance value measured in the air is 28.5 fF. In deionized water, the average interdigitated capacitance value is 43.54 fF. In terms of target sensing objects measurement, a capacitance change of 1.28 fF can be detected. In the measurement of buffers with different pH values, the average capacitance value in buffer solution at pH7 is 34.27 fF. The interdigitated capacitance value increases as the pH value rises with a sensitivity of 2.05 fF/pH (R^2=0.974), showing a high degree of positive correlation.

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