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研究生: 李智群
Chih-Chun Lee
論文名稱: 新型微光學透鏡之製造及整合
Fabrication and Integration of A Novel Micro Lens
指導教授: 方維倫
Weileun Fang
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 動力機械工程學系
Department of Power Mechanical Engineering
論文出版年: 2008
畢業學年度: 96
語文別: 中文
論文頁數: 71
中文關鍵詞: 微光學平台高分子微透鏡條碼掃瞄器
外文關鍵詞: Silicon Optical Bench, Polymer Lens, Barcode Scanner
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  • 在微光機電系統中,由於製程及材料的限制,例如雷射二極體、光檢測器、微透鏡等光學元件,通常以SiP(System in Package) 的方式進行整合。而微光學平台,SiOB(Silicon Optical Bench),的研發瓶頸主要在於半導體製程技術多為二維平面上的加工方法,利用微影製造技術不易達成三維光路配置,且三維空間中微光學元件組裝不易,對準誤差大。
    本研究提出新型固態光學透鏡點膠製程,將液態的高分子材料注入另一液態介質中,利用表面張力成形後固化,可製造出200μm~600μm的球透鏡,其優點為低製造成本,生產時程極短,同時具備極佳的光學品質。透過製程整合實現SiOB,更可發揮固態透鏡以液態成形與微結構自對準的特色。本研究亦將此製程應用於微條碼掃瞄器中,以驗證其製程及整合優勢。


    Generally, the integration of the geometrical optical component with micro system is difficult, because the semiconductor or MEMS machining is usually two dimensional.
    In this study, the polymer optical components dispensed in the buffer liquid is designed and implemented. The fully symmetric spherical lens is successfully formed in the buffer liquid. The ball lens can be used in both in-plane and out-of-plane directions. The polymer lens fabrication process provides a quick forming method for micro ball lens, with perfect surface roughness and self alignment. Moreover, the integration of such 3D polymer lens on SiOB is also demonstrated. Thus, the integration of ball lens on SiOB can be applied for various optical applications, for instance, the barcode scanner.

    目錄 目錄 I 圖目錄 III 表目錄 IX 第1章 序論 1 1-1 研究動機 1 1-2 文獻回顧 2 1-2.1 微透鏡 3 1-2.2 微掃描面鏡 5 1-2.3 微機電元件組裝 6 1-2.4 微光學平台 6 1-3 研究目標 9 第2章 微球透鏡設計製造與分析 26 2-1 微球透鏡製造方法 26 2-2 微球透鏡製造結果與分析 27 第3章 微球透鏡與微結構製程整合與結果 34 3-1 微球透鏡製造與微結構製程整合 34 3-2 製程整合實驗結果 35 3-3 微球透鏡與微結構自對準能力探討 35 第4章 微型條碼掃瞄器設計 45 4-1 光學元件設計 45 4-2 公差分析 47 4-3 矽微光學平台製程流程 47 4-4 其他元件之整合 49 4-5 製程結果 49 第5章 元件量測與系統測試 58 5-1 矽晶格面光學品質量測 58 5-2 球透鏡品質量測 58 5-3 系統測試 59 第6章 結論與未來工作 64 第7章 參考文獻 67

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