六維運動量測裝置是由上平板、下平板以及六支具有光學尺的伸縮量測桿所組成，六支可伸縮量測桿各別安裝於對應的上下平板球穴，將此六維運動量測裝置安裝於機器進行誤差量測時，上平板會相對固定的下平板進行運動，透過可伸縮量測桿的光學尺獲得量測桿的移動量，並藉由計算得到上平板相對下平板的六維運動關係。
論文以六維運動量測裝置為基礎，提出機構參數建立流程的改善方法，並分析機構參數對量測的影響，並以嚴謹的機構參數建立方法得到準確之機構參數。另外，根據分析結果定義機構參數的誤差模型，提出機構參數之數值調變方法，使六維運動量測裝置能根據量測誤差以調變方法進行機構參數的修正。
本論文也研究倒掛型之六維運動量測裝置，以安裝自製探頭的方式構成座標量測機，提出石英平板與龍門架熱誤差的補償模型以抑制熱誤差對於座標量測機的影響，經定位實驗驗證，倒掛式六維運動量測裝置於X、Y、Z方向之單向定位精度為±2.5μm、±1.5μm、±2.3μm，經由機構參數調變方法進行修正，可將定位精度提升至±1.6μm、±1.4μm、±1.5μm。

The Six-Degree-of-Freedom Motion Measurement Device(MMD) is composed of a top plate, bottom plate and six extensible ball bars with linear scale which are installed to the corresponding socket on the plate. When the device is installed on the machine to preform error measurement, top plate will move relatively to the bottom plate, and can get the displacement of each extensible ball bar which can be used to calculate the six DOFs motion between top plate and bottom plate.
The research of thesis is based on Six-Degree-of-Freedom Motion Measurement Device, give out the improved method of establishing kinematic parameters of the device and analysis the effect of these parameters and rigorously establish the kinematic parameters. Use the result of analysis can define the error model of kinematic parameters and give out the numerical method let the system can update its kinematic parameters through its measurement error.
The thesis also research the inverted type of Six-Degree-of-Freedom Motion Measurement Device, by installing the self-made probe to perform a coordinate measurement device, also give out the thermal error compensation model of the quartz plate and gantry in the coordinate measurement device to suppress thermal error. Verified by the positioning experiments, the unidirectional accuracy of X, Y and Z axis of the inverted type of Six-Degree-of-Freedom Motion Measurement Device is ±2.5μm, ±1.5μm and ±2.3μm and by using the updated kinematic parameters from numerical method, the unidirectional accuracy of X, Y and Z axis can be improved to ±1.6μm, ±1.4μm and ±1.5μm.

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