研究生: |
王聲凱 |
---|---|
論文名稱: |
多重壓印光子晶體對發光元件出光光型之影響 Lighting Profile Shaping Effects of Multiple Imprinted Quasi-Photonic Crystals on Light-Emitting Devices |
指導教授: | 齊正中 |
口試委員: |
岑尚仁
林仲相 |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies |
論文出版年: | 2012 |
畢業學年度: | 100 |
語文別: | 中文 |
論文頁數: | 93 |
中文關鍵詞: | 多重壓印 、出光提取 、出光光型 |
外文關鍵詞: | Multiple imprinted, Light extraction, Lighting profile |
相關次數: | 點閱:4 下載:0 |
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本論文在有機發光二極體 (Oganic Light-Emitting Diode, OLED) 的陽極層製作出光提取結構,陽極層的材料是氧化銦錫 (Indium Tin Oxide, ITO),製程分別以光學微影來製作微米等級的網格 (Grid) 結構和以奈米壓印微影 (Nanoimprint lithography) 製作奈米等級的光子晶體結構,用來提升OLED 的出光效率並簡化元件的製程步驟;在蝕刻這兩種結構時,各採用了乾式蝕刻與濕式蝕刻兩種方法,實驗的結果都顯示乾式蝕刻的圖形不易失真且粗糙度也較為平整,而擁有Grid 結構的ITO 玻璃,無論是採用乾蝕刻或濕蝕刻的製程,在製作
成OLED 元件後其出光效率都提升了約10%。
另一方面利用奈米壓印搭配正方晶格光子晶體模具 (Mold),透過旋轉模具的簡單方式進行多次壓印來製作複雜結構的類光子晶體,實驗結果的繞射圖形呈現高度的旋轉對稱性;接著將一次壓印、二次壓印 (Rotate 45°) 和三次壓印 (Rotate 30°/30°) 的光子晶體結構翻成透明的PDMS (Polydimethylsiloxane) 薄膜,再藉由白光發光二極體(Light-Emitting Diode, LED) 去做出光光型的量測,量測的結果顯示一次壓印、二次壓印的結構對於出光光型的影響不大,但在三次壓印的光子晶體作用下,可看出光型在50°和130°的位置有明顯變化。
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