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研究生: 王聲凱
論文名稱: 多重壓印光子晶體對發光元件出光光型之影響
Lighting Profile Shaping Effects of Multiple Imprinted Quasi-Photonic Crystals on Light-Emitting Devices
指導教授: 齊正中
口試委員: 岑尚仁
林仲相
學位類別: 碩士
Master
系所名稱: 電機資訊學院 - 光電工程研究所
Institute of Photonics Technologies
論文出版年: 2012
畢業學年度: 100
語文別: 中文
論文頁數: 93
中文關鍵詞: 多重壓印出光提取出光光型
外文關鍵詞: Multiple imprinted, Light extraction, Lighting profile
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  • 本論文在有機發光二極體 (Oganic Light-Emitting Diode, OLED) 的陽極層製作出光提取結構,陽極層的材料是氧化銦錫 (Indium Tin Oxide, ITO),製程分別以光學微影來製作微米等級的網格 (Grid) 結構和以奈米壓印微影 (Nanoimprint lithography) 製作奈米等級的光子晶體結構,用來提升OLED 的出光效率並簡化元件的製程步驟;在蝕刻這兩種結構時,各採用了乾式蝕刻與濕式蝕刻兩種方法,實驗的結果都顯示乾式蝕刻的圖形不易失真且粗糙度也較為平整,而擁有Grid 結構的ITO 玻璃,無論是採用乾蝕刻或濕蝕刻的製程,在製作
    成OLED 元件後其出光效率都提升了約10%。
    另一方面利用奈米壓印搭配正方晶格光子晶體模具 (Mold),透過旋轉模具的簡單方式進行多次壓印來製作複雜結構的類光子晶體,實驗結果的繞射圖形呈現高度的旋轉對稱性;接著將一次壓印、二次壓印 (Rotate 45°) 和三次壓印 (Rotate 30°/30°) 的光子晶體結構翻成透明的PDMS (Polydimethylsiloxane) 薄膜,再藉由白光發光二極體(Light-Emitting Diode, LED) 去做出光光型的量測,量測的結果顯示一次壓印、二次壓印的結構對於出光光型的影響不大,但在三次壓印的光子晶體作用下,可看出光型在50°和130°的位置有明顯變化。


    摘要 I 致謝 II 目錄 III 圖目錄 IV 表目錄 VII 第一章 緒論 1 1-1 前言 1 1-2 研究動機 2 第二章 實驗原理與相關理論基礎 5 2-1 氧化銦錫 5 2-2 光學微影 6 2-3 光子晶體 8 2-4 奈米壓印微影 12 2-5 濕式蝕刻 14 2-6 電漿製程 15 2-6-1 電漿增強化學氣相沉積 18 2-6-2 乾式蝕刻 19 2-7 原子力顯微鏡 21 2-8 掃描式電子顯微鏡 22 第三章 實驗方法 24 3-1 出光提取結構 24 3-2 光罩設計 24 3-3 光學微影製程 28 3-4 奈米壓印微影製程 41 3-4-1 模具製作 41 3-4-2 出光提取結構製作 48 3-4-3 多次壓印 53 第四章 實驗結果 56 4-1 光學微影結果 56 4-2 奈米壓印微影結果 63 4-3 出光光型量測 77 第五章 結論 88 參考文獻 89

    [1]陳金鑫, 黃孝文, “OLED:夢幻顯示器Materials and Devices-OLED材料與元件”, 五南圖書出版公司 (2007).
    [2]Y. J. Lee, S. H. Kim, J. Huh, G. H. Kim, Y. H. Lee, "A high-extraction-efficiency nanopatterned organic light-emitting diode", Appl. Phys. Lett., Vol. 82, No. 21, May 26 (2003).
    [3]M. Fujita, T. Ueno, T. Asano, S. Noda, H. Ohhata, T. Tsuji, H. Nakada, N. Shimoji, "Organic light-emitting diode with ITO/organic photonic crystal", electronics letters, Vol. 39, No. 24, Nov 27 (2003).
    [4]M. Fujita, T. Ueno, K. Ishihara, T. Asano, S. Noda, "Reduction of operating voltage in organic light-emitting diode by corrugated photonic crystal structure", Appl. Phys. Lett., Vol. 85, No. 23, Dec 6 (2004).
    [5]M. Fujita, K. Ishihara, T. Ueno, T. Asano, S. Noda, H. Ohhata, T. Tsuji, H. Nakada, N. Shimoji, "Optical and Electrical Characteristics of Organic Light-Emitting Diodes with Two-Dimensional Photonic Crystals in Organic/Electrode Layers", Jpn. J. Appl. Phys., Vol. 44, No. 6A (2005).
    [6]K. Ishihara, M. Fujita, I. Matsubara, T. Asano, S. Noda, "Organic light-emitting diodes with photonic crystals on glass substrate fabricated by nanoimprint lithography", Appl. Phys. Lett. 90, 111114 (2007).
    [7]U. Geyer, J. Hauss, B. Riedel, S. Gleiss, U. Lemmer, M. Gerken, "Large-scale patterning of indium tin oxide electrodes for guided mode extraction from organic light-emitting diodes", J. Appl. Phys. 104, 093111 (2008).
    [8]D. Stegall, S. Lamansky, J. Anim-Addo, M. Gardiner, E. Hao, L. Kreilich, F. B. McCormick, H. Le, Y. Lu, T. L. Smith, D. Wang, J. Y. Zhang, "OLED Light Extraction with Roll-to-Roll Nanostructured Films", Proc. of SPIE Vol. 7415, 74150S (2009).
    [9]A. O. Altun, S. Jeon, J. Shima, J. H. Jeong, D. G. Choi, K. D. Kima, J. H. Choi, S. W. Lee, E. S. Lee, H. D. Park, J. R. Youn, J. J. Kimb, Y. H. Lee, J. W. Kang, "Corrugated organic light emitting diodes for enhanced light extraction", A.O. Altun et al./Organic Electronics 711–716 Nov (2010).
    [10]W. H. Koo, S. M. Jeong, F. Araoka, K. Ishikawa, S. Nishimura, T. Toyooka, H. Takezoe, "Light extraction from organic light-emitting diodes enhanced by spontaneously formed buckles", Nature Photonics Vol. 4 Apr (2010).
    [11]T. W. Koh, J. M. Choi, S. Lee, S. Yoo, "Optical Outcoupling Enhancement in Organic Light-Emitting Diodes: Highly Conductive Polymer as a Low-Index Layer on Microstructured ITO Electrodes", Adv. Mater., 22, 1849–1853 (2010).
    [12]A. Kumar, R. Srivastava, M. N. Kamalasanan, D. S. Mehta, "Enhancement of light extraction efficiency of organic light emitting diodes using nanostructured indium tin oxide", Optics Letters Vol. 37, No. 4, Feb 15 (2012).
    [13] V. Reboud, A. Z. Khokhar, B. Sepulveda, D. Dudek, T. Kehoe, J. Cuffe, N. Kehagias, M. Lira-Cantu, N. Gadegaard, V. Grasso, V. Lambertini, C. M. S. Torres, "Enhanced light extraction in ITO-free OLEDs using double-sided printed electrodes", Nanoscale, 4, 3495–3500 (2012).
    [14]K. Saxena, V. K. Jain, D. S. Mehta, “A review on the light extraction techniques in organic electroluminescent devices”, Optical Materials 32, 221-233 (2009).
    [15]http://www.zlighting.net/search/led/200801/12279.html
    [16]E. Yablonovitch, “Inhibited Spontaneous Emission in Solid-State Physics and Electronics”, Phys. Rev. Lett. 58 (1987).
    [17]S. John, “Strong localization of photons in certain disordered dielectric super lattices”, Phys, Rev. Lett. 58 (1987).
    [18]劉世鈞, “光子晶體影響發光二極體出光光型之研究”, 國立清華大學碩士論文 (2010).
    [19]M. D. B. Charlton, M. E. Zoorob, T. Lee, "Photonic Quasi-Crystal LEDs:Design, modelling, and optimisation.", Proc. of SPIE Vol. 6486 (2007)
    [20]S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Nanoimprint lithography”, J. Vac. Sci. Technol. B 14(6), Nov/Dec (1996).
    [21]http://www3.physik.uni-greifswald.de/method/afm/eafm.htm
    [22]http://www.purdue.edu/rem/rs/sem.htm
    [23]Y. Sun, S. R. Forrest, “Enhanced light out-coupling of organic light-emitting devices using embedded low-index grids”, Nat. Photonics 2, 483 (2008).
    [24]M. Slootsky, S. R. Forrest, “Enhancing waveguided light extraction in organic LEDs using an ultra-low-index grid”, Optics Letters, Vol. 35, No. 7, Apr 1 (2010).
    [25]http://www.nfc.nctu.edu.tw/mechine_new/mechine/DWL-200.htm
    [26]http://cnmm.web.nthu.edu.tw/files/11-1012-4199.php
    [27]http://www.ndl.org.tw/web/department/cfteam/diffusion_device.php

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