本研究探討單壁奈米碳管曝露於氧氣與氮氣電漿中電阻的變化及機制。經由掃描式電子顯微鏡、拉曼光譜與化學分析電子儀的分析發現，碳管六連環網狀結構會受到電漿破壞，並且會接上含氧或含氮的官能基。我們提出五個電漿對碳管膜的影響模式來解釋所觀察到的現象。

由於其獨特的混成鍵結所形成的六連環網狀結構，奈米碳管擁有高強度、高導電性、高熱導率等許多優異的性質，是極具發展潛力的奈米材料。因為奈米碳管有這些優異性質，許多研究者便希望能夠將其與其他材料合成，尤其是添加於高分子材料之中來加強材料性質。但奈米碳管很難均勻分散於這些材料之中，必須做其他處理以加強其分散性。電漿處理是經常使用來做表面改質的方法，也有不少團隊使用電漿對碳管做處理進而將碳管分散於其他材料之中，研究材料性能提升的效應。但尚未有人研究電漿對碳管處理的同時，奈米碳管與電漿產生何種交互作用。本研究就是研究電漿對碳管處理的同時發生了何種變化，並提出解釋。

This thesis studies resistivity changes of single-walled carbon nanotubes upon plasma treatments of O2 and N2 and analyses based on SEM, Raman spectra and ESCA indicate enhanced phonon scattering arising from disintegration of hexagonal networks and functionalization. Possible scenarios are proposed to explain these phenomena.

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