本論文的研究重點在於分析與設計結合雙穩態撓性機構與SDA之扭轉鏡片。在理論分析方面，推導具雙穩態之扭轉鏡片本身之特性，接著介紹連接SDA之雙穩態撓性機構與SDA之致動原理，另外利用ANSYS模擬軟體對扭轉鏡片之模態與旋轉軸受力作模擬分析。在製程方面分為前段薄膜沉積與後段蝕刻釋放兩部份，前段製程係委託美國Cronos Integrated Microsystems公司的多人共用製程MUMPs (Multi-User MEMS Processes or MUMPsTM) ; 後段製程則是由作者自行製作，方法是使用強酸液體腐蝕氧化矽後以清洗溶液去除強酸，最後以蒸發方式去除清洗溶液。在整體元件的設計方面，同時考慮MUMPs共用製程的限制與扭轉鏡片的特性，使用自動組裝之設計使鏡片出平面。由於本研究在應用上之進階目標為光學讀寫頭之讀取精度提升，此部分使用ZEMAX模擬軟體作分析，以確認此一構想的可行性。

This thesis presents the analysis and design of a type of torsion mirror that integrated with a bistable micro compliant mechanism. The mirror, which is about 300 mm on a side, is driven by a bistable compliant mechanism and has resonant frequencies in the kilohertz range. Having selected the topology of the device, the equations governing the motions and the forces of the torsion mirror and the actuator can be derived. The bistable micro-mechanism being driven by the SDA and the associated torsion mirror are fabricated by the three-layer polysilicon surface micromachining technology supported by MUMPs (Multi-User MEMS Processes Service) of Cronos Integrated Microsystems. The device consists of three major parts: the mirror, compliant mechanism and SDA. The mirror is fixed on the substrate by the hinges. Polysilicon structures with integrally fabricated hinges are rotated out of the plane of the wafer after fabrication, and interconnected with other structures to form complex three-dimensional designs with detailed features in all three dimensions. The preliminary simulations of the device include analyzing the nature frequencies and the stresses of the mirror and torsion beam. The stresses on the components were found to be acceptable for preliminary fabrication prototyping.

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