本論文利用微機電技術設計與製造一磁致動器，運用線圈繞線可產生勞倫茲力與電磁力兩種磁致動方式，其具有能同時產生兩相反方向的作用力，及致動力與振幅值優於靜電力之優點。並設計梳狀式電極與平行板式電極之兩種電容感測機制於結構上，期望元件可應用於微陀螺儀與微羅盤之目的。針對兩種磁力與兩種電容感測方式組合有四種不同結構，並有其應用目標。本文針對應用目的上對結構尺寸做設計與模態分析，與量測結果互相比較討論；設計有兩種磁力繞線方式，以理論推導線圈可產生的力矩量值，並比較不同的繞線方式對力矩的影響，再與實驗量測結果互相驗證。針對元件的應用目的作模擬分析，並推導可能產生的電容改變量值。

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