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研究生: 陳孟霖
Chen, Meng-Lin
論文名稱: 利用似噪音光纖雷射脈衝輻照在InGaAs/AlGaAs雷射二極體結構中實現量子井混合
Quantum-well intermixing in InGaAs/AlGaAs laser diode structure by irradiation of noise-like fiber laser pulses
指導教授: 潘犀靈
Pan, Ci-Ling
林登松
Lin, Deng-Sung
口試委員: 楊承山
Yang, Chan-Shan
李晁逵
Lee, Chao-Kuei
學位類別: 碩士
Master
系所名稱: 理學院 - 物理學系
Department of Physics
論文出版年: 2021
畢業學年度: 109
語文別: 英文
論文頁數: 97
中文關鍵詞: 量子井混合似噪音脈衝光纖雷射雷射退火
外文關鍵詞: noise-like pulse(NLP), quantum-well intermixing(QWI), InGaAs/AlGaAs, PAID
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  • 本論文中利用連續波雷射與似噪音光纖脈衝輻照進行能隙工程研究。我也建立了理論架構以分析及推斷實驗數據。以連續波雷射(λ=915 nm)退火實驗時,當雷射輸出功率密度為22 W/mm2 且掃描速度為0.2 mm/s來回掃描10分鐘時,可以在InGaAs/AlGaAs雷射二極體結構中實現量子井混合並達163 meV的能量藍移,然而譜線光致發光強度下降約47%且樣品表面因熱累積造成表面損壞。似噪音脈衝可由全正色散摻鐿光纖雷射產生,我們架設平均輸出功率可達400 mW(脈衝重複率為3.18 MHz),脈衝之具雙尺度,具149皮秒之底座及~137飛秒之尖峰自相關曲線,頻寬為21 nm,透過光纖放大器,雷射輸出功率可以提昇至2.56 W,脈衝能量為0.63微焦耳。利用此光源當似噪音脈衝雷射輸出能量密度為1.66 µJ/mm2 且掃描速度為0.2 mm/s來回掃描10分鐘時,可以在雷射二極體結構中有效實現量子井混合並達到133 meV的能量偏移且光致發光光譜強度僅下降約22%,並且樣品表面並未損壞,這顯示此製程可供高功率雷射光強非吸收窗口之用,以避免光學災變。


    In this thesis, we investigate in bandgap engineering by continuous-wave laser and noise-like pulse laser irradiation. We have also built a theoretical framework for analyzing and evaluating experimental data. The continuous-wave laser (λ=915 nm) annealing experiment perform in the condition that laser output power density is 22 W/mm2 and that the scanning speed is 0.2 mm/s back and forth which last for 10 minutes on InGaAs/AlGaAs laser diode structure. The quantum-well intermixing (QWI) was achieved in the medium and the energy blue shift reached 163 meV. However, the PL spectrum intensity reduced 47 % due to the heat-accumulation induced surface damage. Noise-like pulse can be generated by all-normal dispersion ytterbium-doped fiber laser. This laser can generate the noise-like pulse with output power up to 400 mW, spectral width of 21 nm and double scale pulse duration of 149 ps and 137 fs at a repetition rate of 3.18 MHz. By using pre-amplifier, the laser output power can be scale up to 2.56 W, corresponding single pule energy of 0.63 µJ. In the case that the laser fluence on 1.66 µJ/mm2 and the scanning speed on 0.2 mm/s back and forth for 10 minutes, the QWI can be effectively achieved. The energy shift of QWI is 133 meV, and PL spectrum intensity only reduced 22 % with no surface damage. This shows that the process can be used for high-power laser intensity non-absorbing mirror to avoid catastrophic optical damage (COD).

    中文摘要-------------------------------------------I Abstract-------------------------------------------II 致謝-----------------------------------------------III List of Figures------------------------------------VII List of Tables-------------------------------------XII List of Abbreviations------------------------------XIII Chapter 1 Introduction-----------------------------1 1.1 Motivations and objectives---------------------4 1.2 Project goal-----------------------------------5 1.3 Organization of the dissertation---------------5 Chapter 2 Quantum-well intermixing-----------------7 2.1 Limitations of high-power laser diode operation------7 2.2 Catastrophic optical damage (COD) mechanism----------10 2.3 Quantum well intermixing theory----------------------13 2.4 Non-absorbing mirrors (NAM)--------------------------17 Chapter 3 Theoretical and background---------------------22 3.1 Ytterbium-doped fiber laser and amplifier------------22 3.1.1 Ytterbium-doped fiber------------------------------22 3.1.2 Pumping wavelength of laser diode------------------24 3.1.3 Rare-earth doped fiber amplifier-------------------24 3.1.4 Operation of cladding pumping----------------------24 3.2 Mode-locking techniques------------------------------25 3.2.1 Mode-locking theory--------------------------------26 3.2.2 Active mode-locking--------------------------------28 3.2.3 Passive mode-locking-------------------------------29 3.2.4 Nonlinear polarization evolution (NPE)-------------29 3.3 Nonlinearities in optical fibers---------------------31 3.3.1 Self-Phase modulation (SPM)------------------------31 3.3.2 Stimulated Raman Scattering (SRS)------------------32 3.3.3 Stimulated Brillouin Scattering (SBS)--------------34 3.4 Pulse propagation in optical fiber-------------------34 3.4.1 Basic concept--------------------------------------35 3.4.2 Nonlinear Schrödinger coupled-mode equation--------37 3.5 Noise-like pulses (NLP)------------------------------39 3.5.1 Overview-------------------------------------------39 3.5.2 Characteristics------------------------------------39 3.5.3 Simulation results of pulse propagation through optical fiber----------------------------------------------------41 3.5.4 Physical mechanisms for generating NLP-------------44 Chapter 4 Experimental Methods---------------------------46 4.1 Introduction-----------------------------------------46 4.2 InGaAs/AlGaAs quantum well heterostructure and characteristics ---------------------------------------------------------46 4.3 Laser annealing system setup-------------------------49 4.3.1 Continuous-wave laser annealing system-------------49 4.3.2 Noise-like pulse fiber laser annealing system------51 4.4 Laser source-----------------------------------------53 4.4.1 915-nm chip on submount (COS)----------------------53 4.4.2 Generation of NLP by ANDi fiber laser--------------54 4.5 Summary----------------------------------------------65 Chapter 5 Quantum-well intermixing results---------------67 5.1 QWI by continuous-wave laser irradiation-------------67 5.1.1 Introduction---------------------------------------67 5.1.2 Quantum-well intermixing results-------------------67 5.1.3 Summary--------------------------------------------77 5.2 QWI by noise-like pulses irradiation-----------------79 5.2.1 Introduction---------------------------------------79 5.2.2 Quantum-well intermixing results-------------------79 5.2.3 Summary--------------------------------------------86 5.3 Comparison of CW and NLP laser irradiation-----------87 5.4 Summary----------------------------------------------88 Chapter 6 Conclusions and future works-------------------90 6.1 Conclusions------------------------------------------90 6.2 Future works-----------------------------------------92 Reference------------------------------------------------93

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