研究生: |
陳政琦 Cheng-Chi Chen |
---|---|
論文名稱: |
銅摻雜氧化釕奈米線的製備與單根奈米線電性研究 The Study of Synthesis of Cu-Doped RuO2 Nanowires and the Electrical Property of a Single Cu-Doped RuO2 Nanowire |
指導教授: |
開執中
陳福榮 |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
原子科學院 - 工程與系統科學系 Department of Engineering and System Science |
論文出版年: | 2008 |
畢業學年度: | 96 |
語文別: | 中文 |
論文頁數: | 93 |
中文關鍵詞: | 氧化釕 、奈米線 、銅 |
相關次數: | 點閱:3 下載:0 |
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本論文運用離子佈植的方法,將 Cu 離子佈植入 RuO2 奈米線中
,成功合成銅摻雜 RuO2 奈米線,離子佈植之後接著進行退火熱處理,用以修復離子佈植時所產生的損傷。論文主題在於了解不同劑量的銅離子對於 RuO2 奈米線室溫電性的影響;以及對於 RuO2 奈米線結構的影響。實驗所用的分析儀器包括:掃描式電子顯微鏡-分析佈植前後奈米線表面形貌的變化、穿透式電子顯微鏡-分析銅摻雜 RuO2 奈米線的晶體結構、X 光能量分散光譜-成份分析以及元素的定量、超導量子干涉磁量儀-研究銅摻雜 RuO2 奈米線磁性質變化;以及TEM-STM 系統-兩點量測技術,量測奈米線在室溫時的電性。
我們觀察到佈植 Cu 離子會影響 RuO2 奈米線的結構,並且隨著佈植劑量的增高,RuO2 奈米線被破壞的情況也越嚴重。運用 EDS定量各不同佈植劑量奈米線 Cu 之成分百分比,發現隨著佈植劑量的增加,在銅摻雜 RuO2 奈米線中 Cu 成分百分比確實增加,並利用 X 光能量分散光譜做成之成份分佈影像圖( EDS-mapping )來觀察 Cu 在奈米線中分佈的情況,發現 Cu 在奈米線中並沒有特別聚集的現象。利用 TEM-STM 系統量測銅摻雜 RuO2 奈米線室溫的電性,發現奈米線的電性受到 Cu 離子佈植的影響,使得電阻率變高,而退火熱處理之後因為晶格的回復導致電阻率的下降。所量測到的電阻率變化,最後與快速傅立葉轉換的影像處理方法做結合,可以合理的解釋退火熱處理對於電阻率的影響。最後利用超導量子干涉磁量儀比較 Cu 佈植前後奈米線磁性的變化,發現其反磁訊號的增強。
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