本研究目的在於製作新型奈米生醫感測元件，而目標將設定在以生物感測器的製作平台整合微機電技術設計並製造新穎、具高性能的微質量或表面電場造成電容變化之感測器，並結合CMOS積體電路製程完成整合型生醫感測器晶片。
本論文將介紹以交叉電極型式微結構之CMOS MEMS 生醫感測器的設計概念。設計以TSMC 0.35 μm 2P4M 標準製程製作整合性晶片，論文中主要可以分成交叉電極感測結構、CMOS感測電路及表面修飾理論。而檢測生物分子的一種有希望的方法是黏著分子於二氧化矽表面上，生物分子黏著導致表面壓力引起懸臂樑彎曲或表面電場改變，造成交叉電極電容變化。希望藉由直接電路整合降低寄生電容所帶來的訊號衰減及電路噪聲大。當抗體/抗原結合時因表面電場的改變而有電容的變化或感測抗體/抗原結合時的位移變化而造成之電容變化。而感測為電容變化的大小，期望達到微小化且能精確量測電容的新型感測器。而電容式生醫感測器直接量測交叉電極型式結構之電容，並由電路輸出端得到電壓訊號，便可得知其電容變化量。我們成功量測到不同濃度的金奈米粒子所造成的電容變化。
本研究論文很重要的意義在於整合生醫感測符合標準製程，使其有機會量產應用於市場。

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