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研究生: 戴竹君
Chu Chun Tai
論文名稱: 表面聲波感測器偵測胺類氣體與超臨界流體清洗光阻殘餘物
Surface acoustic wave sensor for detecting amine vapors and removal of photoresist residue using supercritical fluids
指導教授: 凌永健
Yong-Chien Ling
口試委員:
學位類別: 碩士
Master
系所名稱: 工學院 - 奈米工程與微系統研究所
Institute of NanoEngineering and MicroSystems
論文出版年: 2005
畢業學年度: 93
語文別: 中文
論文頁數: 101
中文關鍵詞: 表面聲波感測器胺類氣體超臨界二氧化碳光阻殘餘物
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  • 本碩士論文研究方向主要分為兩大部分,第一部分為研發表面聲波元件以偵測胺類氣體,主要是以金屬紫質系列的氯化血紅素,當作表面聲波感測器的感測薄膜,吸附常見的臭味胺類氣體,結果顯示此種感測薄膜對胺類氣體有一定的選擇性;除此之外,利用IR及XPS測定氯化血紅素中央鐵金屬的配位吸附以及周圍酸根的酸鹼反應,了解感測薄膜和胺類氣體的吸附作用機制。

    第二部分為研發超臨界二氧化碳法以去除乾式蝕刻及電漿灰化後的光阻殘餘物。首先利用XPS、SIMS及SEM觀察及鑑定殘餘物的結構,設計使用過氧化苯甲醯溶解於乙醯丙酮之中,加入催化劑三乙胺,再注入超臨界二氧化碳之中,於60℃及80℃水浴中,清洗光阻殘餘物。結果顯示,藉由超臨界流體溶解反應物並帶入樣品中,利用過氧化物氧化降解高分子的機制,可有效地去除矽層上的高分子光阻殘餘物。


    第一章 緒論 1 1.1 研究動機與目的 1 1.1.1表面聲波感測器偵測胺類氣體 1 1.1.2 超臨界流體清除光阻殘餘物 2 1.2 參考文獻 4 第二章 表面聲波感測器偵測胺類氣體 5 2.1 前言 5 2.1.1氣體感測器 5 2.1.2 金屬紫質 7 2.1.5 自組裝薄膜 9 2.1.3 氣體吸脫附曲線 10 2.1.4 配位吸附 11 2.1.6 研究動機 13 2.2 實驗方法 14 2.2.1 藥品 14 2.2.2 表面聲波感測器製作 14 2.2.3 感測薄膜製作 15 2.2.3.1 旋轉塗布 15 2.2.3.2 自組裝薄膜 15 2.2.4 量測系統 16 2.2.5 感測器特性 18 2.2.6 儀器 19 2.3 結果與討論 20 2.3.1 材料鑑定 20 2.3.2 偵測穩定性與熱脫附 21 2.3.3 偵測極限與偵測線性 22 2.3.4 偵測選擇性 23 2.3.5 感測機制 24 2.3.6 氯化血紅素和胺類 26 2.3.7 金屬紫質與金屬酞菁 28 2.4 結論 29 2.5 參考文獻 31 第三章 超臨界流體清洗光阻殘餘物 50 3.1 超臨界流體簡介 50 3.1.1 定義 50 3.1.2 性質 50 3.1.3 超臨界流體的選擇與相關應用 51 3.2 半導體製程清洗光阻 52 3.2.1 低介電材料 52 3.2.2 光阻 53 3.2.3 去除光阻製程之概述 53 3.2.4反應離子蝕刻 54 3.2.5 乾式去除光阻 55 3.2.6 臭氧水去除光阻 56 3.2.7 超臨界流體清洗光阻 56 3.2.8 過氧化物降解高分子 58 3.2.9 研究方法與動機 59 3.3 實驗材料與方法 60 3.3.1 藥品 60 3.3.2 實驗設備 61 3.3.3 試片以及材料準備 61 3.3.4實驗步驟 62 3.3.5 實驗儀器 63 3.3.6 分析儀器 64 3.4 結果與討論 65 3.4.1 電漿反應離子蝕刻形成的高分子殘餘物 65 3.4.2 利用氧電漿灰化移除光阻及氯碳化合物 67 3.4.2 超臨界流體清洗高分子殘餘物及氧化層 69 3.5 結論 74 3.6 參考文獻 75

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