本論文建造一套可在高真空環境下傳送樣品的TDS(thermal desorption spectroscopy)系統，在替換樣品的過程可使分析腔保持在真空環境，並對鋁合金樣品在升溫過程產生的脫附分子作分析研究。
主系統不鏽鋼腔體在前置實驗中，必須經由烘烤加熱降低背景值，其中利用殘餘氣體分析儀以及游離式真空計分別量測腔體內部各分子的分壓以及總壓變化，發現在烘烤過程腔體內部有碳氫化合物的脫附分子產生，推測來源為烘烤時的局部加熱造成的內部零件熱釋氣汙染。烘烤後有效降低腔體背景值，主腔體氣壓由3.85x(10^-8) mbar降至2.2x(10^-9)mbar。在熱脫附過程控制升溫速率
0.25℃/sec時，可於樣品120℃時得到最大脫附，定量此時水的脫附總量為
(1.54±27%) X(10^17)個水分子，並求得脫附能為(27.08±2.5%)%kcalmol^-1。
本論文中熱脫附過程腔體的背景影響以及升溫速率的變化皆對實驗造成誤差，若能使升溫速率固定並持續加溫超過500℃，便可進一步釐清脫附分子的結合能變化。

In this thesis, a TDS (Thermal Desorption Spectroscopy) system was
established at the vacuum system to measure the amount of molecular vapor desorbed on the aluminum surface during the thermal desorption process. In addition, the vacuum chamber can stay in a high vacuum sate when the sample is replaced.
Before the TDS experiment, the main chamber needed to be baked out because the full bake out provides a better vacuum. During the baking process, hydrocarbon molecular were detected by RGA. Hydrocarbon molecular were from the components in the vacuum system because some parts of the vacuum system were overheating. After baking process, the total pressure of the system is from 3.85x(10^-8)mbar to 2.2x(10^-9) mbar. For the TDS experiment, an aluminum sample was heating up at a rate 0.25℃/sec. The desorption peak appeared at 120℃ and the corresponding desorption energy of water was (27.08±2.5%)%kcalmol^-1. The amounts of water vapor desorbed were(1.54±27%) x10^17 molecules.
For the TDS process, if the heating temperature can reach to 550℃ that will clarify the changes of the binding energy.

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