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研究生: 劉亘浩
Liu, Hsuan-Hao
論文名稱: 以CuTiNb2O8為燒結助劑之高熱導率及低溫燒結氧化鋁研究
Low-fire, high-thermal-conductivity of Al2O3 with CuTiNb2O8
指導教授: 簡朝和
Jean, Jau-Ho
口試委員: 林樹均
Lin, Su-Jien
葉均蔚
Yeh, Jein-Wei
學位類別: 碩士
Master
系所名稱: 工學院 - 材料科學工程學系
Materials Science and Engineering
論文出版年: 2019
畢業學年度: 108
語文別: 中文
論文頁數: 45
中文關鍵詞: CuTiNb2O8氧化鋁低溫共燒陶瓷熱導率微波性質
外文關鍵詞: CuTiNb2O8, Al2O3, LTCC, Thermal conductivity, Microwave properties
相關次數: 點閱:3下載:0
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  • 本研究探討 CuTiNb2O8(CTN-112)-doped Al2O3的燒結機制。透過 摻 雜 10 vol%的 CTN-112,可以將 Al2O3的自由燒結溫度從 1600 °C降至 1025 °C。
    CTN-112與 Al2O3的介面會發生反應,在 CTN-112比例較少的時候形成
    CuNb2O6(CN-12)而在比例較多時生成 Cu4TiNb4Ox(CTN-414),並在 1006-1010 °C反應產生液相加速晶界間的物質傳遞速率,提升 Al2O3的緻密行為。 而 在液
    相生成 前的緻密行為來自於 在 Al2O3晶粒 間 富含 Cu、 Ti和 Nb的晶界玻璃膜
    (Intergranular glassy film, IGF)結構,晶界膜的出現降低了晶界能,提高了燒結
    驅動力,動力學上晶界膜能夠降低晶界移動的活化能,提高晶界的遷移能力。
    性質的部分以 10 vol% CTN-112添 加的 Al2O3為最佳 ,介電常數 為 11 而
    Q∙fr (Q為品質因子, fr為共振頻率 )為 7577 GHz共振 頻率 為 11 GHz,此系統可
    以達到極高的熱導率 17 W/m·K,遠高於目前市面上常見的 低溫共燒陶瓷基板 材
    料 (約 2.5 W/ 90 vol% Al2O3+10 vol% CTN-112的 熱膨脹係數 為 5.79 ppm/°C


    Effects of crystalline CuTiNb2O8 (CTN-112) addition on densification, and physical properties of Al2O3 have been investigated. With 10 vol% CTN-112 present, the densification temperature of Al2O3 is greatly reduced from >1600oC to 1025oC. This is attributed to an interfacial reaction taking place between CTN-112 and Al2O3, which yields an Cu-Ti-Nb-rich intergranular glassy film (IGF) before the liquid phase of Cu4TiNb4Ox (CTN-414) is formed at 1006-1010oC. The Cu-Ti-Nb-rich IGF provides a faster kinetic route for ions to diffuse, promoting the densification kinetics of Al2O3+CTN-112 composite. A higher densification with increasing CTN-112 content at a given sintering temperature is observed; however, the thermal conductivity, dielectric and mechanical properties of the resulting Al2O3+CTN-112 composites become deteriorated. The binary Al2O3+10 vol% CTN-112 composite densified at 1025oC has a thermal conductivity of 17 Wm-1K-1, dielectric constant of 11 and product (Q·fr) of quality factor (Q) and resonant frequency (fr) of 7,000-8,000 GHz at 11-12 GHz.

    目錄 一、 前言 1 1.1 CTN-112晶體結構 3 1.2 實驗動機 4 二、實驗步驟 5 2.1 粉末製備 5 2.1.1原料 5 2.1.2 CTN-112粉末合成 5 2.1.3試片製備 5 2.2 相對燒結密度 6 2.3 X-ray繞射分析 6 2.4 顯微結構觀察與統計分析 6 2.5 熱差分析 7 2.6 燒結收縮量測 7 2.7 高頻介電性質量測 7 2.8 熱傳導性質量測 8 2.9 機械性質量測 8 三、結果與討論 9 3.1 添加 CTN-112對 Al2O3燒結行為的影響 9 3.2 燒結後 XRD分析 9 3.2.1 CTN-112與 10 vol% CTN-112添加之 Al2O3 9 3.2.2 CTN-112添加量對平衡相的影響 10 3.3 助燒機制分析 11 3.3.1 熱差分析 11 3.3.2 XRD液相分析 12 3.3.3 燒結機制分析 12 3.3.1 液相燒結晶粒成長機制 14 3.4活化燒結 14 3.4.1 液相生成前的助燒行為 14 3.4.2 顯微結構觀察 15 3.4.3 晶粒成長動力學 15 3.5 Al2O3/CTN-112系統性質量測 16 3.5.1 微波性質 17 3.5.2 熱傳導係數 18 3.5.3 機械性質 19 四、結論 20 五、參考文獻 21

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