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研究生: 孫正澔
Sun, Cheng-Hao
論文名稱: 等速驅動整合式微型可調變流體振盪器的設計與三維列印
Design and 3D Printing of a Constant-Speed Driven Reconfigurable Integrated Microfluidic Oscillator
指導教授: 蘇育全
Su, Yu-Chuan
口試委員: 陳紹文
Chen, Shao-Wen
陳宗麟
Chen, Tsung-Lin
學位類別: 碩士
Master
系所名稱: 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年: 2025
畢業學年度: 113
語文別: 中文
論文頁數: 138
中文關鍵詞: 微型可調變流體振盪器流體等效電路模型等速驅動三維列印
外文關鍵詞: Microfluidic oscillator, Fluidic equivalent circuit model, Constant flow rate, 3D printing
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  • 本論文致力於設計與開發一種新型微型可調變流體振盪器,該振盪器在等
    速驅動條件下運行,並利用光固化三維列印技術實現製造。相較於傳統振盪器
    設計,本文提出的振盪器在結構設計上更加緊湊,展現出高度的靈活性與易製
    造性,適用於生物醫學檢測、軟體機器人、自適應控制等多元領域,為未來微
    流體技術的廣泛應用開闢了新的可能性。
    在具體設計方面,振盪器以流體等效電路模型為基礎,結合神經網路模型
    進行優化,用於預測和優化振盪器的性能參數,能夠精確調整流阻、流容、彈
    簧常數、開關壓力及薄膜厚度等關鍵參數,從而實現對輸出訊號週期與壓力特
    性的細緻調控。同時,振盪器融入螺紋機構設計,使其能夠在實際操作中快速
    進行即時調整,滿足多場景、多需求的操作要求。研究中採用氣體作為工作流
    體,並藉由優化光劑量分布及後處理工藝,製造出高解析度、高性能的微流體
    元件,充分展示了 DLP 三維列印技術在微流體領域中的應用潛力。
    實驗結果表明,該振盪器能實現 0.6 秒至 12 秒範圍內的振盪週期調整,
    並提供 2 kPa 至 40 kPa 的壓力範圍可控性。透過流體等效電路模型進行分析
    與設計,該設計方法有效降低了流體系統的建模複雜性,並結合神經網路進一
    步提高模型準確性,使其能快速響應多種操作場景,並準確預測輸出與輸入關
    係,使振盪器在多變的操作條件下均能保持優異的穩定性與靈活性。本研究成
    果不僅在理論上為微流體技術提供了新思路,還在實踐中構築了一套創新性的
    設計與製造框架,為推動微流體技術的持續發展奠定了堅實的基礎。


    This thesis presents a novel micro-adjustable fluid oscillator that operates under constant flow rate driving conditions. Fabricated using DLP photopolymer-based 3D printing, the oscillator features a compact and efficient structure with high flexibility and ease of fabrication. This design is applicable to various fields, including biomedical diagnostics, soft robotics, and adaptive control.
    The oscillator utilizes an optimized fluidic equivalent circuit model integrated with a neural network to precisely control parameters such as flow resistance, capacitance, spring constant, membrane thickness, and switching pressure. This allows for fine-tuning of the oscillation period and pressure characteristics. A threaded mechanism allows for real-time adjustments to meet diverse operational needs. Using gas as the working fluid, high-resolution, high-performance microfluidic components are fabricated by optimizing light dosage distribution and post-processing techniques, highlighting the potential of DLP 3D printing for microfluidic applications.
    Experimental results demonstrate that the oscillator can adjust the oscillation period within a range of 0.6 to 12 seconds and control the pressure between 2 kPa and 40 kPa. The fluidic equivalent circuit model simplifies system analysis. Integration with a neural network improves model accuracy and enables rapid response to varying operating conditions. The oscillator exhibits excellent stability and flexibility under various operating conditions. This study provides a novel design and fabrication framework for microfluidic devices, advancing both the theoretical and practical development of microfluidic technologies.

    摘要 ii ABSTRACT iii 致謝 iv 目錄 v 表目錄 viii 圖目錄 ix 符號目錄 xiii 第一章 介紹 1 1.1 微流體系統簡介 1 1.1.1 微流體元件 2 1.1.2 微流體模擬電路 3 1.2 微流體系統製造 4 1.2.1 軟微影製成 4 1.2.2 三維列印翻模技術 6 1.2.3 三維列印技術 7 1.2.4 注塑成型 10 1.3 光聚合反應 11 1.3.1 自由基型聚合反應 11 1.3.2 陽離子型聚合反應 13 1.4 研究動機 14 第二章 文獻回顧 15 2.1 微流體控制元件 15 2.1.1 開關元件 15 2.1.2 增益閥 22 2.1.3 逆止閥 29 2.1.4 微型泵 31 2.2 微流體振盪系統 38 2.2.1 環形振盪器 38 2.2.2 雙穩態振盪器 44 2.2.3 開關式振盪器 48 2.2.4 生物式振盪器 50 2.3 微流體集成系統 52 2.4 流體等效電路模型 59 2.5 三維列印用於微流體系統 61 2.6 總結 64 第三章 振盪器設計與測試流程 66 3.1 振盪器設計 66 3.1.1 開關結構 68 3.1.2 調整結構 72 3.1.3 連接結構 76 3.2 元件製程與測試機台介紹 77 3.2.1 上拉式DLP三維列印機台 77 3.2.2 應力量測機台 79 3.2.3 壓力感測器 80 3.2.4 其他實驗設備與儀器 80 3.2.5 元件製造流程 81 3.3 元件測試平台 86 第四章 測試結果與模型建立 88 4.1 振盪器測試 88 4.1.1 開關壓力測試 89 4.1.2 性能測試 92 4.1.3 振盪器性能比較 98 4.2 振盪器模型分析 99 4.2.1 流體等效電路模型 100 4.2.2 神經網路模型 118 4.2.3 兩種模型的比較與改進 122 4.3 研究成果討論 123 4.3.1 振盪器的製造與設計 124 4.3.2 振盪器模型分析 125 第五章結論 126 5.1.1 振盪器的設計 127 5.1.2 振盪器的製造 128 5.1.3 振盪器模型分析 129 第六章 未來工作 131 6.1元件設計與製程優化 131 6.2振盪器的應用與開發 133 參考資料 135

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