研究生: |
尤嘉正 Chia-Chen Yu |
---|---|
論文名稱: |
模擬高介電材料在場效電晶體及快閃記憶體之應用 Simulation of MOSFET and Flash devices with High-K Material |
指導教授: | 張廖貴術 |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
原子科學院 - 工程與系統科學系 Department of Engineering and System Science |
論文出版年: | 2005 |
畢業學年度: | 93 |
語文別: | 中文 |
論文頁數: | 104 |
中文關鍵詞: | 高介電 |
外文關鍵詞: | FIBL |
相關次數: | 點閱:3 下載:0 |
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隨著元件縮小,穿遂電流大幅提昇,High-K已是目前半導體產業相當熱門的一項議題,但是使用了High-K卻會對元件產生非預期的FIBL效應。本論文透由模擬軟體,模擬元件使用High-K材料後的FIBL效應,並提出高於K值50之後,FIBL效應會加劇約2.8倍。以及其他相關改善的方法,包含堆疊結構或是新的元件DTMOS的使用,也將探討熱門基板材料Ge搭配High-K會有較佳的效果,並模擬其它材料特性對其搭配High-K材料的影響,包含基底材料和High-K本身的電子遷移率、能隙大小以及能態密度跟電子親和力等,發現到Ge基底抑制FIBL材料是根據能隙較小和DOS較大的原因,而High-K材料本身能隙大小也是其影響的重要因素,真實High-K材料能隙較小,FIBL亦比模擬要為嚴重。
而積體電路的另一重要分支便是記憶體,因此在論文的另一部份便是模擬快閃記憶體(Flash),並提出使用High-K材料可在相同EOT提高電荷保持力,以及面臨的困難有影響寫入跟抹除的能力。最後驗證新的元件結構『非對稱』(High-K/Low-k)和『對稱』(Low-K/High-K/Low-K)改善其問題,利用非對稱結構可大幅提昇寫入效率但抹除卻改善不多,而對稱結構卻可改善非對稱的缺陷。此外我們也模擬在上層絕緣層改用High-K材料,對其提高寫入和抹除效率,做其電荷耦合比和能障的討論,得到結論在上層固定EOT情形下,K值小於20會有最佳的效果。
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