目前台灣多數半導體公司皆已擁有一個以上的晶圓廠，而在現行制度下，各晶圓廠間之產能借調是由相關晶圓廠自行協商調度，故易受到許多主觀性與非技術性的因素影響而使產能支援程度大打折扣。因此本研究的目的為針對多廠區之半導體製造公司的各晶圓廠間產能支援作業，建立一套系統性的方法來求解出一組整體性產能支援方案，以期在維持每個晶圓廠各自營運以獲取本身最大利潤的經營模式下，達到兼顧提高整體公司生產與獲利的目標。
本研究以Hung and Leachman [1996]所提出的線性規劃生產計劃模型為基礎求解各單一晶圓廠在其產品需求與產能限制下的最佳生產計劃，然後從最近的生產計劃期開始檢視所有晶圓廠在該計劃期下之各種資源(如各類加工機台等)的產能缺乏與剩餘狀況，並針對該期之產能不足資源項目尋找對應於不同廠間之相同計劃期與同類資源的可行產能支援來源。逐期解決各計劃期的各項產能支援作業，直到所有計劃期的產能不足資源項目都完成可行產能調度為止。

實驗分析結果顯示，本研究提出之產能支援方法不但在改進獲利方面的效果頗佳，且具有方便使用及快速求解的優點。本方法平均可提昇整體公司獲利8.7%，並改善與最佳獲利間的差距程度達80%以上；在不限定最小產能移動量時，利用本方法可求得最佳整體生產計劃的比例超過35%。而應用於規模愈大(晶圓廠數愈大)以及晶圓廠間產能差異愈大的問題時，可提昇及改善獲利的程度也愈高。另外，應用本研究方法尋找產能支援方案的平均求解時間約為一分鐘，其中小型問題(晶圓廠數小者)的平均求解時間不超過10秒，較大型問題的平均求解時間亦不超過三分鐘。因此本研究方法可以有效應用於多廠區半導體製造公司，以更客觀且有效率的規劃各廠間的產能支援作業，並獲得更佳的成效。

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Most semiconductor manufacturing companies in Taiwan own several wafer fabrication factories. If a factory need extra capacities and another factory has surplus capacities, the backup plan has to be determined through negotiation. However, they are unable to obtain a better capacity backup plan because of non-technical issues. This lowers the overall productivity and profitability of a multiple factories semiconductor manufacturer. Therefore, this study presents a systematic method capable of solving capacity backup plans for multiple factories semiconductor manufacturers.
By using the “Production planning model” proposed by Hung and Leachman [1996], the production plan of each individual factory can be calculated by optimally allocating its available capacities and maximizing its cash flows. After listing the tight or the surplus of all the resources in various periods among all factories, the surplus and tight between two factories of the same resource could be matched. We continue the capacity matching process in period order until no surplus and tight items can be matched.

Experiment results show that the proposed method can not only significantly improve the overall profitability but also solve the whole capacity backup plan quickly. It increases the profit margin by 8.7%. The average profit increase is 80% of the gap between the original profit and the optimal one. In addition, over 35% of the problems can obtain optimal production plans when the minimal capacity movement is zero. The average time it takes to solve the whole capacity backup plan is about 1 minute. It takes less than 10 seconds and less than 3 minutes for solving problems with fewer and more factories, respectively. The results of this study demonstrate that the method proposed herein allows multiple factories semiconductor manufacturers to objectively and efficiently draw up better capacity backup plans to enhance the overall productivity and profitability.

Abstract ii

第一章 緒論 1

1.1 研究背景 1

1.2 研究動機 3

1.3 研究目的 4

1.4 研究方法 5

1.5 論文架構與研究流程 7

第二章 文獻探討 9

第三章 多廠區生產計劃 13

3.1 問題假設與名詞定義 13

3.1.1 問題假設 13

3.1.2 Event-based模型與Rate-based模型 14

3.2 線性規劃生產計劃模型 15

3.3 產能支援方法 17

第四章 實驗設計與結果分析 24

4.1 實驗設計 24

4.1.1 實驗問題基本設定 24

4.1.2 實驗設計因子 25

4.1.3 實驗績效評估方式 26

4.2 實驗結果與分析 28

4.2.1 因子檢定分析 29

4.2.2 綜合結果與圖表分析 33

第五章 結論與未來研究方向 45

5.1 結論 45

5.2 未來研究方向 45

參考文獻 47

CPLEX (1999), Reference Manual, ILOG CPLEX 6.5.
Feigin, G., Fowler, J., Robinson, J., and Leachman, R. C. (1994), “Semiconductor Wafer manufacturing Data Format Specification,” SEMATECH.
Hackman, S. T. and Leachman, R. C. (1989), “A general framework for modeling production,” Management Science, Vol. 35, No. 4, pp. 478-495.
Hillier, F. S. and Lieberman, G. J. (1995), Introduction to Operations Research, 6th edition., McGraw-Hill Book Co., Singapore.
Hung, Y.-F. and Leachman, R. C. (1996), “A Production Planning Methodology for semiconductor Manufacturing Based on Iterative Simulation and Linear Programming Calculations,” IEEE Transactions on Semiconductor Manufacturing, Vol. 9, No. 2, pp. 257-269.
Leachman, R. C. (1986), “Preliminary design and development of a corporate-level production planning system for the semiconductor industry,” ORC Report 86-11, Engineering Research Center, University of California, Berkeley.
Leachman, R. C. (1992), “Modeling Techniques for Automated Production Planning in the Semiconductor Industry,” ESRC Report, 92-7/RAMP92-4, University of California, Berkeley.
Stevenson, W. J. (1996), Production/Operations Management, 5th edition., Irwin., Homewood, IL.

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