六維運動量測裝置(six-DOFs Motion Measurement Device)是基於六連桿平行機構的量測裝置，此量測裝置用於誤差量測時，可直接量測刀具相對工件之六維運動或定位相對關係，並可在一次的安裝架設下，於一個參考座標系中量出工具機之各項幾何誤差及運動軌跡，且量測路徑規劃自由度高，可執行直線、循圓等不同大小路徑之量測。
本研究針對六維運動量測裝置之量測結果進行數據處理，得出工具機各線性軸及轉動軸運動軸向，建立工具機理想座標系，以計算出工具機三線性軸間之垂直度誤差。再由各軸之定位值求出各定位點之六項運動誤差，包括軸向定位誤差、兩項直線度誤差及三項轉動角度誤差。
在進行工具機誤差計算時，本論文建立兩種不同意義之工具機誤差模型，第一種是以驅動軸為基礎之工具機誤差模型，第二種是工具機工件座標系或工作空間之定位誤差模型。所提出的量測原理及方法，對Hexapod、Hexa-M、Linapod等不同構型設計之六維運動量測裝置均適用。
另外，本論文中研發之量測系統，配合上述不同構型之六維運動量測裝置，也可用於工具機之即時動態軌跡誤差量測，量測路徑可自由規劃，如圓路徑、轉角路徑或任何程式定義之運動路徑。

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