矽脊形波導及環形共振腔之光學特性分析｜國立清華大學博碩士論文庫

簡易檢索 / 詳目顯示

回結果列表

研究生：	張引誠 Chang, Yin-Cheng
論文名稱：	矽脊形波導及環形共振腔之光學特性分析 Analysis on Characteristics of Silicon Rib Waveguide and Micro Ring Resonator
指導教授：	趙煦 Chao, Shiuh
口試委員:
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies
論文出版年：	2009
畢業學年度：	97
語文別：	中文
論文頁數：	66
中文關鍵詞：	矽波導、環形共振腔、光學特性
相關次數：	點閱：3 下載：0
分享至:	分享至facebook 分享至twitter

查詢本校圖書館目錄查詢臺灣博碩士論文知識加值系統勘誤回報

本篇論文主要針對脊形矽波導及環形共振腔建立一套標準測試流程，量測其相關參數及分析光學特性。
論文的第一部分將介紹試片的準備及標準測試流程，試片的準備包括切割、研磨與拋光、清洗試片以及鍍抗反射層；標準測試流程包括標準耦光步驟及找出測試系統中的擾動。
論文的第二部分將量測脊形矽波導之光學損耗，包括TE及TM兩種模態下的吸收、散射損耗以及彎曲損耗，其中將討論各種光學損耗的計算方法及結果
論文的第三部分說明環形共振腔的量測及討論，量測主要針對曲率半徑100□m、與直線波導有著不同的間隙之環形共振腔，可得到功率耦合係數與其間隙之關係；另外量測此環形共振腔之溫度效應，即溫度變化時對環形共振腔共振波長之影響。最後比較環形共振腔在TE、TM兩種不同模態下的穿透頻譜及探討其光學特性，並討論未來改進的方向，以得到更可靠之分析結果。

論文口試委員審定書   ………………………………………………………….   i
授權書    ……………………………………………………………………………  ii
摘要   …………………………………………………………………………….  iii
誌謝   …………………………………………………………………………….  iv
目錄   ……………………………………………………………………………..  v
表目錄   ……………………………………………………………………… ..  viii
圖目錄   ………………………………………………………………………….  ix
第一章    導論……………………………………………………………………..   2
    1.1    前言……………………………………………………………………..   2
    1.2    論文內容概述…………………………………………………………..   3
第二章    試片準備及標準測試流程......................................................................   4
2.1   試片準備...............................................................................................   4
      2.1.1   切割與研磨.....................................................................   4
      2.1.2   試片的清洗.....................................................................   6
      2.1.3   在端面上鍍抗反射層………………………………….   7
2.2   標準測試流程.......................................................................................   9
      2.2.1   測試系統架設.................................................................   9
      2.2.2   耦光標準流程.................................................................  10
2.3   量測系統之Fabry-Perot來源...............................................................  12
第三章  矽波導之光學損耗分析........................................................................  17
3.1   光學損耗的來源...................................................................................  17
      3.1.1   吸收損耗.........................................................................  17
      3.1.2   散射損耗.........................................................................  18
      3.1.3   彎曲損耗.........................................................................  18
3.2   直線波導之光學損耗量測方法與結果...............................................  19
      3.2.1   量測方法.........................................................................  19
      3.2.2   量測結果.........................................................................  20
              TE模態.........................................................................  20
              TM模態........................................................................  22
3.3   彎曲損耗量測方法與結果...................................................................  23
      3.3.1   量測方法.........................................................................  23
      3.3.2   量測結果.........................................................................  23
              TE模態..........................................................................  23
              TM模態.........................................................................  26
3.4   彎曲波導的散射及吸收損耗...............................................................  27
      TE模態………………..................................................................  28
      TM模態……………….................................................................  29
第四章      環形共振腔之光學特性分析..................................................................  32
4.1   環形共振腔之原理...............................................................................  32
4.2   量測前的設定.......................................................................................  34
      4.2.1   溫度控制vs.穿透頻譜....................................................  34
      4.2.2   量測系統穩定度.............................................................  35
      4.2.3   雷射波長掃描解析度與重複準確度.............................  36
      4.2.4   極化控制.........................................................................  37
4.3   環形共振腔參數的計算方法...............................................................  38
      4.3.1   Fit function T(λ)………………………………………..  38
      4.3.2   由Q-factor、T(λr)求解...................................................  38
4.4   環形共振腔在TE模態下量測的結果與分析....................................  39
      4.4.1   環形共振腔參數的計算……………………………….  39
      4.4.2   環形共振腔的溫度效應.................................................  47
4.5   環形共振腔在TM模態下量測的結果與分析...................................  48
      4.5.1   環形共振腔參數的計算.................................................  48
      4.5.2   環形共振腔的溫度效應.................................................  52
4.6   環形共振腔在TE與TM模態下量測結果之比較............................  53
第五章       結論........................................................................................................  59
參考文獻..................................................................................................................  60
附錄A    曲率半徑100□m、間隙75nm的環形共振腔TE模態下
1500~1550nm之量測結果 ....................................................................  62
附錄B    Q-factor與功率耦合係數之關係 ........................................................   66

                                

1. C. S. Yen, Z. Fazarinc and R. L. Wheeler, “Time Domain Skin Effect model for Transient Analysis of Lossy Transmission Lines,” Proceedings of the IEEE, 70, 750-757, 1982.
2. R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quant. Electron., QE-23, 123-129, 1987.
3. D. S. Rubio, L. Liao, A. Liu, R. Jones and M. Paniccia, “A gigahertz silicon-on-insulator Mach-Zehnder modulator,” Optical Society of America, 2004.
4. J. T. Robinson, L. Chen and M. Lipson, “On-chip gas detection in silicon optical microcavities,” Optics Express, 16, 2008.
5. E Hercht Optics, 3rd edn, Addison-Wesley, Reading, MA, ch.9, 1998.
6. Graham T. Reed Silicon Photonics the State of the Art, Adcanced Technology Institute, University of Surrey, UK, ch.7, 2008.
7. T S Moss, G J Burell and B Ellis, “Semiconductor Opto-electronics,” Butterworth, London, 1973.
8. R A Soref and J P Lorenzo, “All-silicon active and passive guided wave components for λ=1.3 and 1.6 μm ,” IEEE J.Quant. Electron., 22, 2003.
9. P K Tien, “Light waves in thin films and integrated optics,” Appl. Opt., 10, 2395-2413, 1971.
10. John M Senior, “Optical Fiber Communication – Principles and Practice,” 3nd ed, Ch3, Pearson Education, 2008.
11. E A J Marcatili and S E Miller, “Improved relationships describing directional control in electromagnetic wave guidance,” Bell Syst. Tech. J., 48, 2161-2188.
12. C. T. Shih, Zhi Wei Zeng, Y. C. Chang, Y. J. Lee and S. Chao, “Optical Design of Bent Rib Waveguide with MOS Cross-section,” J. Lightwave Technology., 2008
13. G Tittelbach, B Richter and W Karthe, “Comparison of three transmission methods for integrated optical waveguide propagation loss measurement,” Pure Appl. Opt., 2, 683-706, 1993.
14. K. K. Lee, D. R. Lim, H. C. Luan, A. Agauwal, J. Foresi, and L. C. Kimerling, “Effect of size and roughness on light transmission in a Si/SiO2 waveguide: Experiments and model,” Appl. Phys. Lett., 77, 1617, 2000.
15. J. M. Bennett and H. E. Bennett, “Handbook of Optics,” W. G. Driscoll, ed., McGrawHill, 1978.
16. G. T. Reed and A. P. Knights, “Silicon Photonics - An Introduction,” John Wiley&Sons Ltd, Ch7, 2004.
17. K. Okamoto , “Fundamentals of Optical Waveguides,” Academic Press, ch4, 2000.
18. 黃維傳, “在矽基板上使用金氧半導體電光效應之環形共振腔特性模擬與分析,” 清華大學碩士論文, 2006.
19. S. A. Clark, B. Culshaw, E. J. C. Dawney and I. E. Day, “Thwemo-optic phase modulators in SIMOX material,” Proc. SPIE, 3936, 16-24, 2000.
20. K. Preston and M. Lipson, “Slot waveguides with polycrystalline silicon for electrical injection,” Optics Express, 1527, 17, 2009.
21. S. Xiao, M. H. Khan, H. Shen and M. Qi, “Modeling and measurement of losses in silicon-on-insulator resonators and bends,” Optics Express, 10553, 15, 2007.
22. T. K. Liang, L. R. Nunes, H. K. Tsang and M. Tsuchiya, “TE/TM Mode Conversion in Silicon Waveguides Using Selective Stress Applying Oxide Patches and Etched Oxide Windows,” 2nd Group IV Photonics Conference, Belgium, 2005.
23. M. Born and E. Wolf, “Principles of Optics,” Cambridge University Press, 7th edn, Ch. 15, 1999.
24. D. K. Sparacin, S. J. Spector, and L. C. Kimerling, “Silicon Waveguide Sidewall Smoothing by Wet Chemical Oxidation,” Journal of Lightwave Technology, 23, no.8, 2005.

全文公開日期本全文未授權公開 (校內網路)
全文公開日期本全文未授權公開 (校外網路)

簡易檢索 / 詳目顯示

相關論文