微機電與微加工技術是目前工業發展的主流，使用傳統機械加工方式製作高縱橫比結構，具有刀具磨損、加工時間長和不能大量生產等問題。藍寶石是硬脆材料，難以用傳統的機械加工方法加工。

在本研究中，我們使用在感應耦合電漿蝕刻單晶藍寶石製程中，使用電鍍鎳為硬遮罩及Cl2/BCl3/Ar為蝕刻製程氣體。使用Cl2/BCl3/Ar的氣體來蝕刻藍寶石，過程變量包括BCl3流量比和偏壓功率。經過540分鐘蝕刻，得到深度95 μm，晶體寬度30 μm，晶體間隙115 μm，具垂直側壁輪廓內角89.5°的X光藍寶石共振腔，也成功地觀察到藍寶石共振腔之共振腔之共振能譜。

另外，已經開發了一種新穎的封裝技術，使用Nd ：YVO4和CO2等雷射對氮化鋁鎵/氮化鎵場效電晶體生物感測器封裝進行雷射鑽孔加工。為了製造PMMA模具、PMMA流道和毛細力流道，我們調查了雷射鑽孔參數對PMMA基材、雙面膠帶和親水膜造成的影響。

使用CO2雷射鑽孔技術對親水膜和雙面帶進行圖案化以產生流道和出口圖案。然後將雙面膠帶和親水性薄膜疊形成毛細力流道。也利用此CO2雷射鑽孔技術對PMMA基板產生圖案化，以產生PMMA模具和PMMA流道。

將微型化的氮化鋁鎵/氮化鎵高電子遷移率電晶體嵌入在環氧樹脂基板中並與金屬電極連接。使用Nd：YVO4雷射鑽孔將環氧樹脂基板製成micro-SD卡形狀和兩個圓孔之鑽孔加工。將環氧樹脂基板並通過光阻防護，在電晶體和閘極極區域上形成開口，接著和PMMA 流道和毛細流道黏合形成微流道。

最後，將C-反應蛋白適體固定在毛細力流道內的氮化鋁鎵/氮化鎵高電子遷移率電晶體上。使用這種一次性生物感測晶片和可持式讀取裝置在標準溶液和人類血清中成功地檢測到CRP。結果證明，這種可持式系統在未來的個人醫療保健中是具有發展潛力的。

Microelectromechanical Systems and micromachining is the mainstream of industrial development. Use of traditional machining to make high aspect ratio structure has disadvantages like tool wear, longer processing time and cannot be mass produced. Sapphire is hard and brittle material and it is very difficult to use the traditional mechanical processing methods to process it.

In this study, we used electroplated Ni as a mask during sapphire inductively coupled plasma (ICP) etching with Cl2/BCl3/Ar gas mixtures. A gas mixture of Cl2/BCl3/Ar was used to etch the sapphire with process variables including BCl3 flow ratio and bias power. An X-ray sapphire resonator cavity with a depth of 95 μm, a crystal width of ~ 30 μm, a crystal gap of ~115 μm, and a vertical sidewall profile of 89.5 ° was obtained by etching for 540 minutes. The resonant spectrum of the x-ray resonant cavity of the sapphire was successfully observed.

In addition, a novel package technology has been developed for miniaturized AlGaN/GaN field-effect transistor biosensors by Nd:YVO4 and CO2 laser drilling. We investigated the effect of laser drilling parameters on the PMMA substrate, double side tape and hydrophilic film, which are required for PMMA mold, PMMA channel and capillary channel.

A hydrophilic film and double side tapes were patterned using CO2 laser drilling to generate a channel and an outlet pattern. The stack of double side tapes and hydrophilic film were then stuck together to form the capillary microchannel. The PMMA substrate was also patterned using CO2 laser drilling to generate a PMMA mold and PMMA channel.

The miniaturized AlGaN/GaN high electron mobility transistors (HEMTs) were embedded in an epoxy substrate and connected with metal electrodes. The epoxy substrates were drilled in the shape of a micro-SD card with two holes by Nd:YVO4 laser. The epoxy substrate was passivated by photoresist to make openings on the transistor and gate electrode regions, followed by bonding a microfluidic channel made of PMMA and capillary channel.

Finally, C-reactive protein (CRP) aptamer was then immobilized on the AlGaN/GaN HEMT inside the capillary channel. CRP was essfully detected in standard buffer solution and human serum using the disposable biosensor chip and the portable readout device. The result shows that this portable system is promising in personal healthcare in the future.

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