本篇論文主要在SOI基板上製作矽微環型共振腔之被動元件，波導總高度為0.25μm，波導寬度為0.5μm，脊型波導肩膀高度為0.05μm，屬於單模態條件，元件主要在國家奈米元件實驗室，利用0.35μm半導體標準製程所製作，利用Elionix E-beam(ELS7500電子束直寫系統)曝光，由於是利用Gaussian beam單點式曝光方式，所以在定義環型波導時有較好的邊線，可以減少量測時的光學損耗，本論文針對不同半徑與間隙下量測其光學參數，最高Q factor可以達到65516，在半徑5μm條件下，環型共振腔光學損耗為0.09dB/turn以下，這些結果可做為未來製作主動元件參考之用。

[1] R. A. Soref and B. R. Bennett, “Electrooptical effects in silicon,” IEEE J. Quant. Electron., QE-23, 123-129, 1987.
[2] D. S. Rubio, L. Liao, A. Liu, R. Jones and M. Paniccia, “A gigahertz silicon-on-insulator Mach-Zehnder modulator,” Optical Society of America, 2004.
[3] Q. Xu, B. Schmidt, S. Pradhan and M. Lipson, ”Micrometre-scale silicon electro-optic modulator,” Nature, vol. 435, pp. 325-327,2005.
[4] A. Yariv, “Universal relations for coupling of optical power between microresonators and dielectric waveguides,”Electronics Letters., 36, 321–322, 2000.
[5] R. Adler, L. J. Chu, and R. M. Fano, Electromagnetic Energy transmission and Radiation (Wiley and Sons, NewYork, 1960).
[6] Apollo photonics, “APSS Apollo Application Note on Micro Ring Resonator,” Apollo, 2003.
[7] B. E. A. Saleh, M. C. Teich, “Fundamentals of photonics,” Wiley, 2nd ed, Ch. 10, 2007.
[8] B. E. Little, S. T. Chu, H. A. Haus, J. Foresi, and J.-P. Laine, “Microring Resonator Channel Dropping Filters,” J. Lightwave Technology., Vol. 15, No. 6, June 1997.
[9] R. A. Soref, J. Schmidtchen, and K. Petermann, “Large single mode RIB waveguides in GeSi-Si and Si-on-SiO2,” IEEE J. Quantum Electron.,vol. 27, pp. 1971–1974, 1991.
[10] Souren P. Pogossian, Lili Vescan, and Adrian Vonsovici, “The Single-Mode Condition for Semiconductor Rib Waveguides with Large Cross Section,” J. Lightwave Technology., Vol. 16, No. 10, October 1998.
[11] A. G. Rickman, G. T. Reed, and F. Namavar, “Silicon-on-insulator optical RIB waveguide loss and mode characteristics,” J. Lightwave Technol., vol. 12, pp. 1771–1776, Oct. 1994.
[12] P. K. Tien (1971) ‘Light waves in thin films and integrated optics’, Appl.Opt., 10, 2395–2413.
[13] R. G. Hunsperger (1991) Integrated Optics: Theory and Technology, 3rd edn, Springer-Verlag, Berlin.
[14] Graham T. Reed Silicon Photonics the State of the Art, Adcanced Technology Institute, University of Surrey, UK, ch.4, 2008.

[15] E. A. J. Marcatili and S. E. Miller, “Improved relationships describing directional control in electromagnetic wave guidance,” Bell Syst. Tech.J., 48, 2161-2188.
[16] S. T. Lim, C. E. Png and E. A. Ong, “Single mode, polarization independent submicron silicon waveguides based on geometrical adjustments,” Optics Express, Vol. 15, No. 18, September 2007.
[17] 黃棋林(2011)，”PN接面之矽微環型電光調變器製作”國立清華大學光電工程研究所碩士論文。
[18] 張明仁(2009)，”金氧半電容式微形環狀電光調變器製程開發”
國立清華大學光電工程研究所碩士論文。
[19] P. Rabiei, W. H. Steier, C. Zhang and L. R. Dalton, “Polymer micro-ring filters and modulators,” J. Lightwave Technol., vol. 20, No. 11, November 2002.