雷射干涉重力波偵測器是運用於直接量測重力波存在與否以證明廣義相對論以及開發重力波天文學之重要儀器設備。由於重力波訊號極其微弱，因此需有效降低系統中的各種雜訊才能進行重力波觀測，而系統整體最為靈敏的頻率範圍中以光學薄膜熱擾動所造成的雜訊影響最大。一般以量測機械損耗並藉由統計力學中的Fluctuation dissipation theorem間接得到熱擾動資訊。而欲探討薄膜之機械損耗時，需將薄膜鍍製於本身機械損耗相當低的基板，目前重力波偵測系統是以熔融石英玻璃作為基板，矽基板為下一世代偵測器基板之主要候選材料。考慮重力波偵測系統最靈敏之頻率範圍約在40~400Hz，因此本研究使用矽基板，並製成第一模態之共振頻率在此範圍內的懸臂樑狀。
本論文即是針對矽懸臂樑基板進行探討，包含懸臂樑尺寸設計，以ANSYS模擬各共振模態之頻率、振形，利用機械損耗量測系統進行各模態之損耗量測，將量測結果與暫態分析模擬結果相互比較，以完整建立ANSYS模態、暫態分析模擬及高頻模態機械損耗量測之流程。另一部分則是針對造成機械損耗測量誤差進行分析，統計各共振模態之重覆夾持誤差大小及探討誤差來源。實驗室主要研究為探討各種薄膜材料之機械損耗，其需由量測鍍膜前後試片之機械損耗搭配應變能比而計算出，其中應變能比能以理論公式及模擬求得，而本論文另一部分為建立ANSYS模擬應變能比之流程。

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