研究生: |
郭昱聖 Kuo, Yu-Sheng. |
---|---|
論文名稱: |
STM探針的尖銳化處理-在具奈米顆粒之矽表面 Sharpening of STM tips on nm-size-grain embedded Si surface |
指導教授: |
羅榮立
Lo, Rong-Li |
口試委員: |
簡紋濱
Jian, Wen-Bin 何孟書 Ho, Mon-Shu |
學位類別: |
碩士 Master |
系所名稱: |
理學院 - 物理學系 Department of Physics |
論文出版年: | 2020 |
畢業學年度: | 109 |
語文別: | 中文 |
論文頁數: | 45 |
中文關鍵詞: | 掃描穿隧電子顯微鏡 、場蒸發 、電場梯度引發表面擴散 、原子金屬離子發射 、鎢探針 、修針 、探針處理 |
外文關鍵詞: | field evaporation, field gradient induced surface diffusion, Atomic metallic ion emission, tungsten tip, tip treatment |
相關次數: | 點閱:3 下載:0 |
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奈米尺度下材料的物理和化學特性與巨觀特性明顯不同,如何清楚的觀察到奈米結構的物性和化性,一直是科學家研究的目標。在這篇論文中,我們主要專注在掃描穿隧顯微鏡(Scanning Tunneling Microscope,縮寫為STM)探針的處理和對樣品表面解析度的影響。利用掃描穿隧顯微鏡去掃描經過碳化的Si(111)-7x7表面,在這個表面上形成奈米尺度的碳化矽(SiC)顆粒,顆粒高度約2.5 nm到3 nm,寬度不一。當圖解析度不好時,一般在平坦表面是使用高壓脈衝處理,但在高低不平表面效果不佳,所以使用不同的探針電壓和掃描速度進行操作,可利用SiC顆粒的尺寸變化和圖像變化來判斷探針尖端的變化,我們將此方法稱為高速高壓修針。通過對實驗結果的統計並結合尖銳化處理理論,我們發現了在奈米尺寸SiC顆粒在的Si(111)-7x7表面上探針尖銳化的最佳條件。
The physical and chemical properties of materials at the nanometer scale are significantly different from the macroscopic properties. How to clearly observe the physical and chemical properties of nanostructures has always been the goal of scientists. In this paper, we mainly focus on the processing of Scanning Tunneling Microscopy (STM) tip and the effect on surface resolution. STM is used to scan Si(111) surface which is partially carbonized. This surface consists of nanometer-size SiC particles. The height of the surface particles is about 2.5 nm to 3 nm with varying width. When the image resolution is not good, high-voltage pulse tip treatment is used on flat surfaces, and the effect is not good on uneven surfaces. By operating different tip voltages and scanning speeds, the size change of SiC particles and change of image are used to judge the change of the tip. We call this method high-speed and high-voltage tip treatment. From the statistics of the results and combination with the theory of tip treatment, we find out the best conditions for the sharpening of tip on the Si(111)-7x7 surface embedded with nanometer-size SiC particles.
[1] K. Oura, V. G. Lifshits, A.V. Zotov, M. Katayama, A. A. Saranin, “Surface Science- An Introduction”, p.159-162 (2003)
[2] 羅榮立, “矽表面吸附粒子辨識”, 物理雙月刊(2003)
[3] Nan Yao, Zhong Lin Wang, “Handbook of Microscopy For Nanotechnology”, p.55-p.56
[5]行政院國家科學委員會精密儀器發展中心, “真空技術與應用”
[6]Agilent technologies user manual
[7] C. Julian Chen, “Introduction to Scanning Tunneling Microscopy” Second Edition
[8] R. S. Becker, J. A. Golovchenko and B. S. Swartzentruber, “Atomic-scale surface modifications using a tunnelling microscope”, Nature 325, 419 (1987)
[9] H. J. Mamin, P. H. Guethner, and D. Rugar, “Atomic Emission from a Gold Scanning-Tunneling-Microscope Tip”, Phys. Rev. Lett. 65, 2418 (1990)
[10] Tien T. Tsong, “ Effects of an electric field in atomic manipulations”, Physical Review B 44, 13703 (1991)
[11]D. Croft and S. Devasia, “Vibration compensation for high speed scanning tunneling microscopy”, Review of Scientific Instruments 70, 4600 (1999)
[12] Joost W. M. Frenken , Tjerk H. Oosterkamp , Bas L. M. Hendriksen , and Marcel J. Rost, “Pushing the limits of SPM”, Materials today 8, 20 (2005)
[13] K. Oura, V. G. Lifshits, A.V. Zotov, M. Katayama, A. A. Saranin, “Surface Science An Introduction”, p.183 (2003)
[14] Kunio Takayanagi, Yasumasa Tanishiro, Shigeki Takahashi and Masaetsu Takhashi, “Structure Analysis of Si(111)-7x7 Reconstructed Surface By Transmission Electron Diffraction”, Journal of Vacuum Science & Technology A 3, 1502 (1985)
[15]周勇成, “STM研究Si(111)表面的初始碳化”, 國立清華大學物理系,碩士論文 (2019)
[16] Gh. Tahmasebipour, Y. Hojjat, V. Ahmadi and A. Abdullah, “Optimization of STM/FIM nanotip aspect ratio based on the Taguchi method”, International Journal of Advanced Manufacturing Technology 44, 80 (2009)
[17] F. Marinello, S. Carmignato, A. Voltan, E. Savio and L. De Chiffre, “Error Sources in Atomic Force Microscopy for Dimensional Measurements: Taxonomy and Modeling”, Journal of Manufacturing Science and Technology 132, 030903 (2010)
[18] Yong Chen, “Elucidation and Identification of Double-Tip Effects in
Atomic Force Microscopy Studies of Biological Structures”, Journal of Surface Engineered Materials and Advanced Technology 2, 238 (2012)
[19] Yasser Khan, Hisham Al-Falih, Yaping Zhang, Tien Khee Ng, and Boon S. Ooi, “Two-step controllable electrochemical etching of tungsten scanning probe microscopy tips”, Review of Scientific Instruments 83, 063708 (2012)
[20]黃英碩, “掃描探針顯微術的原理及應用”, 科儀新知第二十六卷第四期
[21]曾一洲, “矽(111)表面形成氬隆起塊的研究”, 國立清華大學物理系,碩士論文 (2018)
[22] H. J. Mamin, S. Chiang, H. Birk, P. H. Guethner, and D. Rugar, “Gold deposition from a scanning tunneling microscope tip”, Journal of Vacuum Science & Technology B 9, 1398 (1990)