本研究主要是設計一微靜電驅動薄膜面鏡之致動器結構，並利用微機電加工的技術作出成品，該薄膜面鏡將具有高頻寬、高靈敏度、高定位精度和體積小的特點，結合微機電積體化、低成本的製造技術，希望使光學薄膜面鏡的重量、體積乃至於成本大幅降低。將此薄膜面鏡使用於光碟機中，輔助或取代光碟機之聚焦鏡進行聚焦，提高光碟機的平均搜尋時間和資料傳輸速率，使其得以趨近硬碟機的速度，使光儲存裝置的性能獲得改善。
本研究的範圍將著重於靜電驅動薄膜面鏡的理論驗證、電極形狀設計、下電極結構製程之改善與致動器性能分析，對於光學系統或靜電致動器之動態控制系統整合之工作暫不予深入研究，但仍希望將此工作酌量放入本研究範圍中。

本研究將建立關於一般靜電致動器與靜電驅動薄膜面鏡之文獻資料庫，並同時使用板殼理論中之能量法與彈簧質量塊模型模擬與驗證靜電驅動薄膜面鏡之靜態與動態性能。此外，亦使用Ansoft公司出品之Maxwell電磁分析軟體分析致動器之靜電場，提出創新下電極形狀設計，以改善致動器之靜電場均勻性。在製程方面，本研究提出以表面細微加工法代替傳統體型細微加工法製作靜電驅動薄膜面鏡之下電極結構，希望改善下電極結構製程之複雜度。最終，建立靜電驅動薄膜面鏡之實驗平台與流程，量測致動器之性能，與模擬結果作比較與討論，並提出未來研究之方向。

A micromachined electrostatically controlled deformable mirror has been applied to the fields of adaptive optics, such as focusing mirrors, rration compensation and wavefront correction. This device is usually composed of a circular membrane and an electrostatic structure bonded underneath the membrane. The former acts as a reflective mirror while the latter provides an actuating force for controlling the curvature of the membrane. This paper presents a design methodology for the development of a deformable mirror.
The static and dynamic performance of the electrostatically driven deformable mirror depends mainly on the depth of the gap, membrane structure, and electrode distribution. By assuming the deflection function and strain energy of the membrane, the nonlinear relation between driving voltage and static deflection of the membrane can be calculated. Both lumped model and energy method are employed to find the natural frequency of the membrane. To design a novel electrode for the focusing mirrors, the Ansoft Maxwell software has been used to analyze the uniformity of electrostatic field.

In this research, surface micromachining is used for the fabrication of the lower electrode structure. This proposed fabricating process reduces the complexity of the traditional process.

Having measured the surface profile and mechanical properties of the membrane, the static deflection and dynamic response of the actuator are investigated. Good agreement between computer simulation and experimental results indicates the correctness of mathematical model and the proposed energy method. Finally, the feasibility and applicability of the proposed methodology are discussed.

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