隨著次微米及奈米科技的進步，微觸印刷技術（Micro-contact Printing Technology）已逐漸成為次世代微電子及光電產業的重要製程技術之一，然而不論是奈米壓印或是微觸印刷，最重要關鍵研究核心課題就是壓合致動器之設計，並整合位置與力量控制於運動控制器；本論文針對音圈制動器（Voice Coil Actuators）應用於微觸印刷技術時所牽涉之元件設計與系統控制分析，進行深入性探討。先從基本磁路設計分析，求得致動器之各項動態參數，方進行控制迴路設計與動態性能之實驗驗證，其中並採用商用套裝分析軟體進行建模與參數計算，最後進行位置與力量控制迴路之整合技術分析，配合實驗設計完成設計參數靈敏度之量測與分析，最終完成音圈致動器與相關控制系統之動態分析研究，對精密機械領域跨入微觸印刷機械設備之研發，期能提供關鍵技術之參考資訊與整合應用技術。

As the progress in sub-micron and nano technology, micro-contact printing technology has become one of the dominant fabrication processes in today's micro-electronics and optoelectronics industries. As a result, the integration of mechanical imprinting mechanisms with precision position/force motional control has been the key issue in the development of micro-contact printing equipments. This thesis has focused on system simulations and dynamic analysis in the applications of voice-coil actuators employed for micro-contact printing technology. Moreover, exploration into relevant subjects have also been conducted in details. Hence, from magnetic circuit analysis of the actuator to design of control algorithms, commercial software packages were employed for establishing models and pertinent parametric analysis. Furthermore, the precision control of position and force were comprehensively investigated with academic interests; and finally, the goal of systematic research on micro-contact printing has been achieved for providing the solid backgrounds in key components design and system implementation.

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