研究生: |
謝孟修 Shie, Meng-Shiou |
---|---|
論文名稱: |
矽積體光學晶片應用於微小化光學陀螺儀 Silicon integrated photonics for miniaturized optical gyroscopes |
指導教授: |
李明昌
Lee, Ming-Chang |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
電機資訊學院 - 光電工程研究所 Institute of Photonics Technologies |
論文出版年: | 2010 |
畢業學年度: | 98 |
語文別: | 中文 |
論文頁數: | 106 |
中文關鍵詞: | 光纖陀螺儀 、光波導 、多模干涉儀 、相位調變 、耦合器 、偏振 |
外文關鍵詞: | Fiber Gyroscope, Optical Wavveguide, MMI, Phase Modulator, Coupler, Polarization |
相關次數: | 點閱:2 下載:0 |
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在市面上,常見的慣性導航系統及方位角參考系統,都是由光纖桑亞克效應(Sagnac effect)干涉儀理論衍伸出來的。在科技日新月異的時代裡,人類對科技的需求更多。因此,開發高靈敏度的積體光學晶片,更是勢在必行的。
在本論文的研究方向是開發積體光學晶片用於微小化光學砣螺儀,初步規劃是除了光纖外,利用矽光子學的技術,把其他的光學元件整合至單一矽晶片上,除了降低各別元件成本外,也可減少光學元件之間的調準。和其他材料如玻璃、鈮酸鋰不同的是,由於矽可製作高侷限性的光波導(線波導),可把光積電路的面積大幅縮小,未來有機會和訊號處理電路整合於單一晶片,而利用成熟的IC製程技術,也可降低生產成本及提升元件性能。
整個晶片使用FimmWave、FimmProp、BPM、FDTD、Medici模擬出最佳尺寸及參數,並使用CMOS製程的方式製作晶片,最後再做電性及光學檢測。我們的晶片其相位調變可達到80MHz,極化分光偏極器的消光比(Extinction ratio)可達到23dB,介入損耗大約為14dB。
Highly sensitive gyroscopes are imperative for inertial navigation. Among all kinds of approaches, passive fiber gyros based on Sagnac effect are extensively used. One of the key components inside fiber gyros is the photonic chip mastering optical signal processing.
In this thesis, we focus on developing silicon-based integrated photonics chips for miniaturized optical gyroscopes. The basic idea is to integrate all optical components, except for the long fiber, on a single silicon chip through CMOS technology. Such integration has advantages in reducing the cost of individual component package and perhaps, the effort of alignment. Moreover, unlike other materials such as silica and lithium niobate, silicon can be utilized to make highly-confined waveguide (silicon photonics wires), dramatically reducing the footprint of the device. Potentially, silicon photonics can monolithically integrate signal-processing circuits on a single chip. Trough mature IC fabrication technology, the production cost could decrease and the device performance improves.
Several simulation tools including FimmWave, FimmProp, BPM, FDTD, and Medici were used for designing the device, and the fabrication was though a CMOS-compatible process. After the device was fabricated, we measured the electronic and optics characteristics. The phase modulation speed could be as high as 80MHz and the ER (Extinction ratio) of Polarization-Diversity Coupler is 23dB. The measured insertion loss is about 14dB.
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