本研究將常用於工業的磁性流體運用於微機電系統，由於微機電元件尺寸為微米尺寸的緣故，並且常有可動件作動，所以微結構的機械性質對於元件有相當的影響，因應不同的元件有相對應的需求或較合適的剛性，例如:微神經探針在刺入生物體時需要相當的剛性以方便刺入，但是剛性大的微神經探針刺入後會產生相對位移，使得生物體受到破壞，造成元件使用壽命縮短，因此可調變剛性的機制在此使用情況下是有其必要性；本研究是利用磁性流體在一均勻磁場的情況下，透過磁場施加在磁性粒子使之產生磁性並且會與磁場方向同方向的機制，透過改變粒子排列方向以及控制磁場大小來達到調變微結構剛性的功能，磁場的大小、方向、磁性粒子的濃度、尺寸都是其控制此機制的參數。

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