Mo/CIAS介面的優化與Cu(In,Al)Se2太陽電池製程之研究

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研究生：	林怡婷
論文名稱：	Mo/CIAS介面的優化與Cu(In,Al)Se2太陽電池製程之研究 Optimization of Mo/CIAS interface for fabricating Cu(In,Al)Se2 solar cell
指導教授：	曾孝明黃惠良
口試委員:	翁恆義孫澄源
學位類別：	碩士 Master
系所名稱：	電機資訊學院 - 電子工程研究所 Institute of Electronics Engineering
論文出版年：	2014
畢業學年度：	102
語文別：	英文
論文頁數：	74
中文關鍵詞：	銅銦鋁硒太陽能電池、硒化製程、濺鍍製作
相關次數：	點閱：3 下載：0
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本研究主要延續學長姐的實驗，利用DC sputter沉積Cu-In-Al 合金靶前驅物，其合金比例為Cu:In:Al=0.9:0.85:0.15，探討在固定比例的合金靶材下提高band-gap的研究；而Mo與CIAS 間的介面問題需要透過硒化的時間、溫度與硒粉的重量解決；透過製程條件獲得覆蓋性佳與透光性佳的CdS薄膜。本研究發現，在硒化前加入約50nm的Al可以提高太陽電池的開路電壓；並加入 i - ZnO 在 CdS 和 Al:ZnO 之間改善開路電壓以及並聯電阻，最後使用 E- Gun 沈積鋁 (Al) 作為前電極增並增加電子收集的能力。
45mg的硒粉、溫度530℃、硒化時間20分可以得到最佳的太陽電池，其開路電壓(Voc)為0.49、短路電流(Jsc)為17.97、填充因子(FF)為0.24，效率為2.11%。

Contents
Abstract                                                            Ⅱ
List of figures                                                    Ⅲ
List of tables                                                    Ⅶ
Contents                                                            Ⅷ
Chapter 1 Introduction                                                1
    Background                                                        1
    Basic principle of Solar cells                                        1
1.2.1 Solar spectrum                                                2
1.2.2 Construction and power generation principles                    3
1.2.3 Optical Absorption in a semiconductor                            4
1.2.4 Operation principles of solar cell                            7
    Types of solar cell materials                                        9
    Motivation                                                      10
    Organization of this thesis                                      11
    References                                             11
Chapter 2 CIAS thin film solar cells                              12
2.1 CIS thin-film solar cells                                           13
 2.1.1 Crystal structure and characteristics of CIS solar cell          13
 2.1.2 The advantages of CIS thin films                              14
2.2 Structure and theory of Cu(In,Al) Se_2  solar cells                  15
 2.2.1 Basic structure of Cu(In,Al) Se_2  solar cell                      15
 2.2.2 The theory of Cu(In,Al) Se_(2 )solar cells                      16
 2.2.3 Absorption layer                                              17
 2.2.4 Back contact layer                                          19
 2.2.5 Buffer layer                                                  20
 2.2.6 Window layer and Front contacts                              20
2.3 Organization of this thesis                                      20
2.4 References                                            21
Chapter 3 Experimental Techniques                              23
3.1 Process flow for Cu(In,Al) Se_2  solar cell fabrication              23
3.1.1 Substrate cleaning                                          24
3.1.2 The sputtering process                                      25
3.1.2.1 Fabrication of back contact                                  27
3.1.2.2 Fabrication of Cu-In-Al precursor                          28
3.1.3 Selenization process                                          29
3.1.4 Fabrication of CdS buffer layer                              30
3.1.5 Fabrication of Window layer                                  32
3.1.5.1 Intrinsic ZnO layer                                      32
3.1.5.2 Transparent Conducting Films AZO                      33
3.2 Characterization Tools                                           33
3.2.1 Metal Four point probes                                      33
3.2.2 Scanning Electron Microscope and Energy dispersive X-ray spectroscopy                                              34
3.2.3 Raman measurement                                          35
3.2.4 X-ray diffraction technique                                  36
3.2.5 UV/Visible Spectrophotometer                              38
3.2.6 Solar simulator                                              39
3.2.7 Quantum efficiency measurement                              40
3.2.8 Secondary Ion Mass Spectrometer, SIMS                      41
3.2.9 Rutherford backscattering spectrometry, RBS                  42
3.3 Organization of this thesis                                      42
3.4 References                                             42
Chap4 results and discussion                                      44
4-1 Mo back contact                                                  44
4-2 CIA precursor                                                  45
4-3 Selenization to form CIAS absorption layer                      46
4-3-1 the amount of selenium powder                              46
4-3-2 Different selenization process temperatures                      52
4-3-3 duration of process                                          53
4-4 CdS buffer layer                                                  58
4-4-1 Different deposition time                                      58
4-4-2 PH value                                                      62
4-4-3 CdCl2 and CS(NH2)2                                          63
4-5 i-ZnO and AZO window layer                                      64
4-5-1 i-ZnO layer                                                  64
4-5-2 AZO window layer                                          65
4-6 Front contact                                                  67
4-7 Fabrication of Cu(In,Al)Se2 solar cells                          68
4-8 Reference                                                      77
Chapter 5 Conclusion and Future work                              78
5.1 Conclusion                                                      78
5.2 Future work                                                      79
5.3 References                                                      80

                                

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