研究生: |
趙哲新 Chao, Je-Shin |
---|---|
論文名稱: |
以表面聲波陣列式震盪電路為基礎之氣體感測系統 Gas sensing system based on surface acoustic wave array |
指導教授: |
饒達仁
Yao, Da-Jeng |
口試委員: | |
學位類別: |
碩士 Master |
系所名稱: |
原子科學院 - 工程與系統科學系 Department of Engineering and System Science |
論文出版年: | 2009 |
畢業學年度: | 97 |
語文別: | 中文 |
論文頁數: | 97 |
中文關鍵詞: | 表面聲波元件 、陣列式震盪電路 、氨氣感測器 、氣體感測器 |
相關次數: | 點閱:3 下載:0 |
分享至: |
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本研究致力於開發陣列式表面聲波量測系統,晶片材料的選擇上,本文選用高K2值之128º YX-LiNbO3 壓電基板,於其上製作指叉換能器(Interdigital Transducer, IDT),並將多種高分子聚合物塗佈修飾於延遲線(delay line)感測區之上。將做好之晶片配合製作出之震盪電路,可得感測晶片之操作頻率約為98.5MHz,在此主動式之量測機制下,再結合感測環境系統以量測特定溶劑之揮發性氣體。
本研究朝向將感測器陣列化和微小化的方向,共分為三個步驟,第一步驟為單顆感測器之量測,此階段確定了單顆表面聲波感測器具有重覆性和可靠度;第二步驟為陣列化四頸瓶量測系統,此階段已實現非連續式陣列化表面聲波電路,透過在簡單的1L四頸瓶系統以PNVP、P4VP、PVAc、PSMA、PS、PSu、PEG七種膜對甲醇、乙醇、氨、三甲基胺、丙酮之量測,確定了陣列化的可行性,且有不錯之表現;第三步驟為陣列式微小化反應盒量測系統,此步驟進而將反應腔體縮小,以更穩定之氣體產生器提供氣體,且選擇特定標的──氨氣做量測,從PNVP、P4VP、PSMA、PCL、PVAc、PS六種膜對不同濃度之氨氣之量測,以長條圖、雷達圖做分析,可得知每種膜在不同測試條件下之反應特性,最後利用線性趨勢線作分析,可加以模擬真實情況下之反應結果。
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