本論文主要為微型發電機之設計與實作，研究中提出機械能式微發電系統中之電磁感應式微型發電機，並提出其相關之理論數學模型，利用此模型，分析懸臂樑形式發電機的動態與頻率響應特性。結果顯示本研究所提出的第二型彈簧之微發電機在1g加速度下，自然共振頻率為3222 Hz，振幅為26 μm。此外，也提出一磁鐵擺設方式，利用軟體模擬磁場變化，並利用這兩種模擬結果，預估會有約0.4微瓦等級能量之輸出。本論文亦利用一般微機電製程，利用單晶圓完成微發電機之製作，達成有效減少晶片面積並可省去接合製程之訴求。而在量測上，四型彈簧自然共振頻分別為3180 Hz、3387.5 Hz、2700 Hz與724 Hz，在0.0015m/s2加速度下，振幅分別為1.7 nm、3.1 nm、2.38 nm以及13.3nm，與理論值誤差在可接受範圍內。

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