研究生: |
李環宇 Lee, Huan-Yu |
---|---|
論文名稱: |
波前拼接法於穿透式光學元件之量測與分析 The Measurements and Analysis for Transmissive Optical Components by using Wavefront Stitching Method |
指導教授: |
王培仁
Wang, Pen-Jen |
口試委員: |
王培仁
陳政寰 許巍耀 |
學位類別: |
碩士 Master |
系所名稱: |
工學院 - 動力機械工程學系 Department of Power Mechanical Engineering |
論文出版年: | 2014 |
畢業學年度: | 102 |
語文別: | 中文 |
論文頁數: | 77 |
中文關鍵詞: | 波前拼接 、非接觸式量測 、夏克-哈特曼感測器 、光學元件測量 |
相關次數: | 點閱:2 下載:0 |
分享至: |
查詢本校圖書館目錄 查詢臺灣博碩士論文知識加值系統 勘誤回報 |
在光學元件的製造過程中,必須用光學量測儀器來檢驗及驗證光學特性,非接觸式的光學量測技術多以干涉儀做為量測平台,干涉儀不但需要較多的光學元件,且對量測環境的敏感度高,花費價格也高。本文使用夏克-哈特曼波前感測器做為波前量測儀器,由拼接波前的方式來量測光學元件的特性,夏克-哈特曼波前感測器是由陣列透鏡分割波前後,利用光點的位置差異來重建波前,因此量測系統不需要複雜的分光及干涉讀取裝置就具有高精度。本文分成兩個部分進行波前拼接量測的系統設計,第一部分進行數值分析,找出適合作為波前量測的演算法以及拼接參數,同時也模擬拼接量測系統理想上的量測精度。第二部分設計一波前拼接量測系統,使用光學模擬軟體分析波前析拼接量測系統的誤差大小,並實際架設此量測系統進行實驗。最後此系統的波前量測結果與Zygo干涉儀量測結果比較得到波前誤差的RMS約為1/30波長。
J. Schwiegerling and D. R. Neal, "Historical Development of the Shack-Hartmann Wavefront Sensor", in Robert Shannon and Roland Shack: Legends in Applied Optics, edited by J. E. Harvey and R. B., Hooker-SPIE, Bellingham, WA, pp. 132-139, 2005.
P. Wilksch and F. Forouzandeh, "Hartmann screen test for measurement of stress," ACOFT & AOS Conference, 2006.
L. Seifert, J. Liesener and H. Tiziani, "The adaptive Shack-Hartmann sensor," Optics Communications, pp. 313-319, 2003.
J. Liang, “Supernormal vision and high-resolution retinal imaging through adaptive optics,” Optical Society of America, pp. 2884-2892, 1997.
R. R. Rammage, R. J. Copland and D. R. Neal, "Application of Shack-Hartmann wavefront sensing technology to transmissive optic metrology," SPIE4779, pp. p161-172, 2002.
M. Bray, “Stitching Interferometry :Recent results and Absolute calibration,” SPIE 5252, pp. 305-313, 2004.
M. Bray, “Stitching interferometry : how and why it works,” SPIE1400, pp. 259-273, 1999.
Y. M. He and G. M. Tang, "Subaperture Stitching Based on Hartmann Wavefront Sensor," SPIE 7656, 2010.
H. Xu, H. Xian and Y. Zhang, "Algorithm and experiment of whole-aperture wavefront reconstruction from annular subaperture Hartmann–Shack gradient data," Optics Express vol 18, 2010.
D. Malacara, Optical Shop Testing 3rd Ed., Wiley, 2006.
G. M. Dai, Wavefront Opitcs for Vision Correction, SPIE, 2008.
V. N. Mahajan, Optical Imaging And Aberrations Part I Ray Geometrical Optics, SPIE, 1998.
V. N. Mahajan, Optical Imaging And Aberrations Part III Wavefront Analysis, SPIE, 2013.
張阜權, 孫榮山 且 唐偉國, 光學, 凡異出版社, 1998.
M. Otsubo, K. Okada and J. Tsujiuchi, "Measurement of large plane surface shapes by connecting small-aperture interferograms," Optical Engineering, pp. 608-613, 1994.
M. Bray, “Stitching interferometer for large piano optics using a standard interferometer,” SPIE 3134, pp. 39-50, 1998.
T. M. Jeong, "Measurement of wave-front aberration in soft contact lenses by use of a Shack–Hartmann wave-front sensor," Applied Optics, vol. 44, pp. 4523-4527, 2005.
J. E. Greivenkamp, "Optical Testing Using Shack-Hartmann Wavefront Sensors," SPIE, vol. 4416, no. 260-263, 2002.
M. Tricard, A. Kulawiec, M. Bauer, G. DeVries, J. Fleig, G. Forbes, D. Miladinovich, P. Murphy, "Subaperture stitching interferometry of high-departure aspheres by incorporating a variable optical null," CIRP Annals - Manufacturing Technology, no. 59, pp. 547-550, 2010.
范乃中, “基於人工眼模型的隱形眼鏡波前像差量測系統研究,” 雲林科技大學,碩士論文,電子與光電工程研究所, 2012.