本論文主要採化學沉澱法製備摻銻氧化錫(Antimony-doped Tin Oxide (ATO))粉體。探討不同製程條件對於ATO特性的影響。首先將五水四氯化錫和三氯化銻利用鹽酸溶解成酸液後與沉澱劑氫氧化鈉進行反應，摻雜不同的銻錫比例 (1%-9%)，改變製程方式、反應溫度。前驅物經高溫燒結450℃-1300℃，獲得ATO奈米粉體。所得ATO分別以熱重分析儀、X光繞射儀、掃描式電子顯微鏡、傅立葉轉換紅外光譜儀、光致螢光光譜作材料性質的測量。由熱重分析結果表明前驅物的燒結溫度應高於450℃；以EDS確定ATO樣品銻錫比例與理論銻錫比例無太大差異。由X光繞射結果並無氧化銻晶相結構存在，得知銻有摻雜進入二氧化錫中，若煅燒溫度過高，銻會因高溫而氣化，產生銻錫比例偏差。掃瞄式電子顯微鏡顯示其形貌會因為摻雜銻、反應溫度和煅燒溫度不同產生粒徑變化。ATO奈米粉體粒徑約在從紅外光譜偵測到450-750cm-1之間有Sn-O的振動吸收，且紅外吸收度隨煅燒溫度上升。在PL光譜中，摻雜後二氧化錫氧空缺複合發光減弱，非固有發光472nm、540nm、672nm全部衰弱，煅燒溫度上升粉體發光強度越強。

Antimony-doped Tin Oxide (ATO) powders were synthesized using a chemical precipitation method. We use both reactants of Tin Chloride and Antimony(III) Chloride as well as urea or Sodium Hydroxide solution as the precipitant to get precursor. Then the precursor with a doping rate varying from 1 to 9 mol.% of Antimony were calcined at 450℃-1300℃ for two hours. The effects of the various synthesizing parameters, including reaction temperature, the doping amount of Antimony, and the calcination temperature of the precursor were investigated in details. The results of energy dispersive spectroscopy (EDS) measurement ensured the stoichiometric ratio of Sb/Sn in our ATO powders. By the thermogravimetric analysis (TGA), ATO powders stability generated when temperature higher than 450℃.In XRD patterns, all our samples exhibit the tetragonal crystal structure of the parent SnO2 compound and no other impurity phase were observed. Thus we can determine that Sb is indeed doped into the Tin Oxide. The powders calcined higher than 1300℃ was difficult to control the Sb doping content, because the evaporation temperature of the antimony oxide is about 1300oC. The images of scanning electron microscopy (SEM) showed the particle size due to antimony-doped, reaction temperature and calcined at different temperatures. In the Fourier-Transform Infrared Spectrum (FTIR), we observed vibration absorptions of Sn-O at 450-750 cm-1. Deep level emission of SnO2 at 472 nm, 540 nm, 672nm weaked with Sb-doping ratio. Calcination temperature and the Sb-doping ratio will affect the absorption intensity.

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