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研究生: 余儒佶
Ru-Ji Yu
論文名稱: 奈米顆粒在微流道內的傳輸狀況
Transportation of Nanoparticles in Micro-Channels
指導教授: 錢景常
Ching-Chang Chieng
曾繁根
Fan-Gang Tseng
蘇育全
Yu-Chuan Su
口試委員:
學位類別: 碩士
Master
系所名稱: 原子科學院 - 工程與系統科學系
Department of Engineering and System Science
論文出版年: 2006
畢業學年度: 94
語文別: 中文
論文頁數: 89
中文關鍵詞: 計算流體力學奈米顆粒微流道
外文關鍵詞: CFD, nanoparticle, microchannel
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  • 本研究旨在探討,奈米顆粒於奈微米流道中的運動,並分析如奈米顆粒尺寸、數目、微流道幾何尺寸、奈米通道尺寸等,對於奈米顆粒通過奈米通道的比率影響。在模擬方面,分別以Eulerian Coordinate來計算流體的守衡方程式、以Lagrangian Coordinate來計算顆粒在流體中的移動,並探討布朗運動(Brownian motion)對於奈米顆粒在流道內運動的影響。在實驗方面,以微機電製程中的反應式離子電漿蝕刻與表面氧電漿處理製作微流道晶片,於高速攝影機下觀察奈微顆粒在流道中的運動情形並與模擬結果做比較。


    目錄 摘要 i 目錄 ii 圖目錄 iii 表目錄 v 第1章 前言 1 第2章 文獻回顧 3 第3章CFD數值模擬 8 3-1數值模擬原理 8 3-1-1 Flow Module Theory 8 3-1-2 Spray Module Theory 13 3-2模擬網格及邊界設置 16 3-3模擬結果 19 3-3-1 Straight Micro-Channel 19 3-3-2 Curved Micro-Channel 26 3-3-2-1 Curved Channel Type One 26 3-3-2-2 Curved Channel Type Two 32 3-3-3 Branched Micro-Channel 35 第4章 第一代微流道晶片 44 4-1晶片設計及原理 47 4-2第一代微流道晶片製程 54 4-2-1 SU-8母模製作 54 4-2-2 PDMS翻模製程 57 4-2-3 晶片組合 59 4-3第一代微流道晶片之實驗結果與討論 61 第5章 第二代微流道晶片 64 5-1晶片設計及原理 64 5-2第二代微流道晶片製程 69 5-3第二代微流道晶片之實驗結果與討論 75 5-4第二代微流道晶片製程改良 81 5-5改良型第二代微流道晶片之實驗結果與討論 84 第6章 結論與未來工作 85 參考文獻 86

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