本研究目的為發展低成本、精度至次微米等級之位移感測器。此裝置概念係將欲量測之次微米位移透過一機械式位移放大器放大百倍至10微米等級後，再以市面便宜常見之Honeywell線性霍爾傳感器讀取放大後的數值。由於此概念尚未應用在現今的感測器技術上，故本研究從概念發想開始著手並選用合適機構，再透過ANSYS模擬出最適配幾何後，製作出基本原型，最後透過渦電流位移計與光學槓桿量測方法驗證其位移放大之可行性與重複精度，可得到準確度0.7 μm，重複精度0.4 μm以及解析度0.1 μm。

This research aims to develop a new precision displacement sensor at sub-micron accuracy level with a cost of a fraction of those of existing commercial devices. The basic concept of the new sensor system is to apply a mechanical mechanism to magnify a sub-micron displacement to be measured by about 100 times so that the magnified displacement becomes within the measurement range of a low cost Hall sensor. Several magnifying mechanisms were considered. Two of them were tested and one was selected as the final approach. Detailed designs were developed and prototypes constructed through several design cycles, assisted with solid mechanics analysis and simulation. Measurements by eddy current sensors and an optical lever method were used as references. The displacement repeatability of the final magnifying mechanism prototype was found to be under 0.4 m. A Honeywell-SS495A Hall sensor with an accuracy of about 10 m was used to measure the magnified displacement. The combined sensor prototype has an accuracy of at least 0.7 μm, a repeatability under 0.4 μm and a resolution of 0.1μm.

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