本研究使用CMOS和LTPS的標準製程，設計開發整合主動操控光感測的像素，用於生醫檢定的應用。一般生醫檢測之發光反應的度較小，要有效分辨雜訊與反應訊號是很大的挑戰。在CMOS photo-sensing pixel，採用脈波頻率調變的架構，以獲得高解析度的電子訊號。在本研究中，波長555nm亮度為0.1LUX的光已經在0.35μm CMOS PFM電路順利偵測。利用LTPS製程下實際量測到P-I-N的暗電流和光電流，在波長為470nm照度為10LUX之光訊號下，採用PWM之像素設計可在時脈為250HZ下，有效測出發光反應。

The goal of this thesis is to develop photo-sensing array, achieving “ bio lab on IC” with CMOS circuit and LTPS panel respectively. To detect low light intensity, PFM (pulse frequency modulation) is a good solution. PWM(pulse width modulation) pixel is another way of extending pixel response resolution. In this work, 0.1LUX light with λ=555 is successfully detected by using PFM circuit realized by CMOS process. To implement the sensing array on LTPS panel, the dark current and photo response of P-I-N diode are analyzed of simulation results of PWM pixel designed to be realized by LTPS process show that 10LUX light can be successfully detect under a clock frequency of 250HZ.

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