本研究的目的，是解決電子顯微鏡應用在活體生物軟物質遇到的挑戰之一-潮濕樣品中的水份會被真空系統抽乾。利用微機電技術所製作的濕室環境元件，是由結構互補的一底座(Out-Frame)與一上蓋(In-Frame)組成，嵌合密封後可將液體樣品保存於真空中，允許電子束穿透的兩薄膜窗口，使影像的取得仍能進行。經由特殊的設計與二次濕蝕刻技術，使元件具有以下特點：1)可放入一般電子顯微鏡試片載台，2)具自我對準機制，3)特殊圓形窗口使可觀察視野最大化，4)依樣品大小製作不同的薄膜間距。5)適合直接於晶片上進行細胞/細菌等微生物培養。後續章節將描述設計原理與實際製作方法。
本研究第二部分，將應用此微型元件於含液體樣品的觀測中。於穿透式電子顯微鏡、掃描電子顯微鏡與穿透X光顯微鏡中使用此元件，以紀錄奈米金粒於甘油溶液中的動態運動軌跡、觀測抗輻射細菌的分裂與量測微結構厚度、比較癌細胞乾燥與含水狀態的影像，以及誘發並觀測奈米氣泡的發生。

This paper describes a Self-Aligned Wet (SAW) cell suitable for direct-cell or bacteria incubation and observation in a wet environment inside a transmission electron microscope. This SAW cell is fabricated by a bulk-micromachining process and composed of two structurally complementary counterparts (an out-frame and an in-frame), where each contain a silicon nitride film based observation window. The in- and out-frames can be self-aligned via a mechanism of surface tension from a bio-sample droplet without the aid of positioning stages. The liquid chamber is enclosed between two silicon nitride membranes that are thin enough to allow high energy electrons to penetrate while also sustaining the pressure difference between the TEM vacuum and the vapor pressure within the liquid chamber. A large field of view in a SAW cell is favored and formed from a larger sized observation window in the out-frame, which is fabricated using a unique circular membrane formation process.
In this paper, we introduce a novel design to circumvent the challenges of charging/heating problems in silicon nitride that arise from interactions with an electron beam. This paper also demonstrates the TEM observations of particles dynamic, D. Radiodurans growth, fixed cell, and nanobubble nucleation in a liquid environment within a thicker chamber within a SAW cell.

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