摘 要
半導體設備供應商大多為外商公司，主要來源為歐、美以及日本等國家，大部份都在台灣成立分公司，少部份為代理商。半導體設備供應商是高度服務導向的產業，無論是設備的裝機、維修以及製程應用，在在都需要原廠工程師的服務和支援。
本研究係以半導體設備產業為研究範圍，並以晶圓製造顧客為研究標的，探討半導體設備供應商的服務品質改善，並以美商公司台灣分公司為實證個案。本研究首先運用訪談法來定義服務品質要素，進而產生本研究的SERVQUAL問卷，並以Kano Model、PZB Model和IPA分析法，來探討分析個案公司的服務品質在「有形性」、「信賴性」、「反應性」、「保證性」與「關懷性」五個構面的表現，目的是為了可以了解客戶期待的服務品質需求(Voice of Customer，VOC) ，發掘個案公司需要改善的「服務品質缺口」，並提出建議個案公司服務品質改善的方向和管理的目標。本論文的研究結果歸納如下：
1. 本研究發現本研究提出的服務品質要素，有部份是具備隠性的魅力服務品質的特性。
2. 本研究發現個案公司沒有看見顧客真正的需求，因而導致不滿意程度遞增。
3. 發掘個案公司應積極改善的服務品質項目。
4. 驗證顧客與個案公司的三個主要服務品質缺口假設皆成立。
5. 台灣半導體製造產業較不重視「軟」的服務品質需求。

Abstract
Most of Semi-conductor equipment suppliers base in Japan, US or Europe. Almost all major suppliers setup local branch in Taiwan. Only a few companies were represented by local Agents. Semi-conductor equipment supplier is a highly service-oriented industry. Customer deeply depends on supplier to provide not only the installation but also process application, periodical maintenance & troubleshooting services.
The scope of this research is within Semi-conductor equipment industry, and more focus on Chip Manufacturing. The objective is to study service quality improvement of an American base equipment supplier. The research develops a SERVQUAL questionnaire by interview key customer to define the key elements of Service Quality. To study service quality of case company in terms of 5 Dimensions: Tangible, Reliability, Responsiveness, Assurance and Empathy. The objectives are: to understand Customer expectations (VOC) and to dig out the service quality GAPs of case company. The research would provide suggestions and directions to the case company for service quality improvement.
Here are conclusions of this research:
1. The research realized a couple of service qualities having Attractive Attribute.
2. The research realized Case company misleading the VOC and lead to increasingly dissatisfaction.
3. Discover service qualities which Case company should pay more attention on it.
4. To validate three hypotheses of this research.
5. Taiwan Semi-conductor industry less care of SOFT service qualities.

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