本論文研究改良六維運動量測裝置，此量測裝置具史都華平台並聯式六連桿機構，以六根雙球量測桿及12個分別固定於上下平台的球軸承座，搭配一台量測電腦，構成六自由度之運動量測系統。此量測系統最大的特性為可以在一次量測過程中，得出三軸或五軸CNC工具機的全部誤差項。
此六維運動量測裝置要能夠準確的量測CNC工具機運動誤差前提是：一、上下平板球軸承中心之座標要準確起始化；二、雙球量測桿量測的實際桿長要準確量測；三、正逆轉換運算的機構參數也必須要考慮環境溫度變化反應。以上關鍵三要點只要其中一點有偏差，將導致整個量測系統的量測精度的降低。深入研究影響上述關鍵三要點之因素，發現誤差主要來自於雙球量測桿設計與加工裝配不良，導致雙球量測桿讀值不能有良好的重複精度及有足夠的測量準確度，此外，整個量測裝置於量測期間受室溫變化影響，所有零組件產生熱變形，致使量測系統之量測精度受到影響。
本研究針對此六維量測裝置的雙球量測桿進行改良設計，並對其裝置之熱誤差進行理論上的分析，推導其熱誤差理論數學模式，並進行熱誤差影響模擬，提出實驗方法實際量測雙球量測桿熱誤差值，與預測之熱誤差值進行驗證比對，並於量測系統建立熱誤差補償功能，做出一套高精度的六維運動量測裝置與系統。

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