現代的半導體製造因為晶圓尺寸的微縮，導致頻繁的使用低氣壓電漿製程，從文獻回顧可以了解到高氣壓的電漿模擬所使用的物理假設並不適用於低氣壓的操作條件，使用計算形式的電子能量分布函數來考量更多的物理效應對低氣壓電漿的模擬是十分必要的，低氣壓下電子的運動過程除了受到局部電場影響之外還必須考量空間變化造成的影響，考慮非局部效應的動力模型會對關鍵的高能粒子分布產生明顯的影響，為了了解低氣壓電漿的物理特性，有許多研究相繼提出不同模型來完成低氣壓電漿的模擬。純流體模型透過假設電子能量分布函數呈現馬克斯威爾分布等固定形式的分布進行模擬，而本研究所採用的模型是透過求解二項近似簡化的波茲曼方程式結合流體模型的混合模型來完成低氣壓電漿的模擬，並建立了簡單的一維模型對其EEDF(Electron Energy Distribution Function)進行分析。
本研究使用了兩種不同的氣相反應式，除了考慮不同的氣相反應之後會對結果直接產生影響，藉由對不同模型的結果分析也可以了解高能電子的分布情形主導著活性粒子的密度差異。另外使用非局部動力模型分析不同氣壓的結果時，可以看到在低氣壓時非局部效應變的很具有影響力，非局部效應明顯的提升了高能電子的分布，在非彈性碰撞反應對高能電子分布敏感以及對模擬結果影響明顯的前提下，非局部動力模型的重要性便是顯而易見的，因此在低氣壓的條件下使用非局部模型是非常必要的，同時通過對EEDF 的分析能為粒子分布帶來更清晰、完整的物理解釋。

Due to the scaling of wafer size in modern semiconductor manufacturing, low pressure plasma processes have become common. From the literature review, the physical assumptions used in high pressure plasma simulations are not suitable for low pressure. Therefore, it is
essential to consider a computational form of the electron energy distribution function(EEDF) to account for more physical effects in low pressure plasma simulations. In addition, the motion of electrons at low pressure is influenced not only by local electric fields but also by spatial variations. The inclusion of nonlocal effects in the kinetic model significantly impacts the distribution of critical high energy particles.
To understand the physical characteristics of low pressure plasma, various research studies have proposed different models for simulating low pressure plasma. A pure fluid model assumes fixed forms of distribution, such as the Maxwellian distribution, for the electron
energy distribution function. The model used in this study combines a simplified Boltzmann equation solved using a binomial approximation with a fluid model, achieving a hybrid model for simulating low pressure plasma. A simple one dimensional model was established to
analyze the EEDF.
Two different gas phase reaction models were employed in this study. Analyzing the results from different models allows us to understand how the distribution of high energy electrons dominates the density differences of particles. When analyzing results at different pressures using a nonlocal kinetic model, it's evident that nonlocal effects are significant at low pressures, leading to a notable enhancement of the high energy electron distribution. Considering the sensitivity of inelastic collision reactions to the distribution of high energy electrons and their significant impact on simulation results, the importance of nonlocal kinetic models becomes evident. Therefore, the use of non local models is essential under low pressure conditions, and analyzing the EEDF provides a clearer and more comprehensive physical explanation for particle distribution.

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