奈米碳管擁有許多特別的材料特性，可以應用在各種不同的研究領域。為了觀察奈米碳管的特殊材料特性，如電性、光學和機械特性。因此，本論文利用微機電製程技術(Microelectromechanical systems，簡稱MEMS)開發批量化且可重複製作(Reproducible)奈米碳管微型感測元件，透過開發這些奈米碳管微型感測元件來觀察上述奈米碳管特性。本論文整合奈米碳管高分子複合薄膜於微型感測元件上。開發方法簡述如下：透過黃光微影步驟定義催化劑鐵膜圖形，將元件放入高溫爐管800°C成長垂直準直性奈米碳管，再利用高分子材料(Parylene-C)沉積於元件上，解決元件與奈米碳管附著性的問題，且經過微機電製程技術調變局部製程變化完成奈米碳管微型感測元件。利用提出的製作方法，開發電性、光學、機械特性的三項奈米碳管微型感測元件：(1)電性轉換電性奈米碳管微型感測元件，以撓性奈米碳管生物電極為例。此電極可以增加整體感測面積，降低電極阻抗。研究順利完成量測螯蝦(Crayfish)神經訊號，此電極的阻抗頻率在1kHz時為11.07kΩ，此頻率為典型神經記錄數值，降低阻抗具有改善神經電極的性能。(2)光學轉換電性奈米碳管微型感測元件，以撓性奈米碳管光感測器為例。此光感測器的光電流反應量測指出在紅光雷射照射下可以依異質介面、壓力、光強度和偏壓的函數操作。操作在大氣壓下，此光感測器的量子效率(Quantum efficiency)為0.063%，在3mTorr真空下為1.93%。(3)機械轉換電性奈米碳管微型感測元件，以奈米碳管機械感測器為例。奈米碳管壓力感測器和溫度感測器單一製作於一晶片上，量測指出奈米碳管壓力感測器的壓阻係數約為20，溫度感測器的靈敏度為-0.19%/°C。

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