在本研究中我們利用微機電的製程技術提出了一種有別於傳統形式的燃料電池設計。其特殊之處在於我們把陰極與陽極整合在同一個平面上，而這樣的設計與傳統所謂三明治結構的組裝方式有相當大的差異。我們稱這樣的設計叫做單一共平面式設計(Co-planar type)，其中“單一”的部份是指無串聯的意思。
在設計的部份我們把集電器與觸媒層整合在同一個流道上，並且利用添加硫酸當作電解質的方式來傳遞在流道上反應產生的質子，達到三相定理的必要條件。而反應所需的氧氣，則利用空氣幫浦在陰極的硫酸水溶液中連續施打使水溶液呈現富氧的狀態。之後我們更利用微機電整合性的優點，整合加熱器在流道上，這樣可以省去甲醇預熱的裝置，更確實縮小體積，節省能源，同時達到整體效能的提升。然而除了實驗外我們也建立了數值的模組來搭配分析所有的操作條件。
製程部分利用KOH蝕刻200μm深度，的流道，黃光微影技術定義電極形狀，最後利用準分子雷射打穿燃料進出需要的孔洞。而在加熱器設計的部份，我們選用金屬鉻，定義出長63mm寬500μm 蜿蜒式的加熱器(總電阻為5.2kΩ)。當我們施加83mA在電極上時，可以達到大約85℃的溫度。
結果部份，在甲醇濃度2M,硫酸濃度1M下,當我們施加溫度80℃時，電流密度值在5.16mA/cm2下有最大功率值約為0.992 mW/cm2 。

This research is to fabricate μ-DMFC (micro direct methanol fuel cell) by using MEMS technology. A novel concept of design, compared with the traditional type of DMFC, has been designed and fabricated, which anode and cathode are made in the same plane so called coplanar type of DMFC.

In this coplanar type of DMFC, we also integrate the current collectors and catalyst layer on the flow channels. In order to conform the three phase theory, we use sulfuric acid as electrolyte which be used to deliver protons. And we pumping air in the cathode fuel make it reach oxygen saturation.

In order to improve the performance of entire system, we want to integrate the fuel preheat device on the chip, so heater was put on the flow channels. By this way we don’t use the preheat device which be used to traditional fuel cell, then we can save volume and energy consumption, and increase performance in the same time.

Not only the mathematical model was built, but also the experiment data were measured by using developed μ-DMFC.

The fabrication of coplanar type μ-DMFC was designed. KOH was used to etch flow channel, then photo resistance was sprayed on the top of flow channels. Lift-off technique was used to define patterns after evaporator deposition. Finally, LASER was used to drill the holes for the inlet/outlet of fuels. Aspect of heater design, we chose Cr metal, 500μm wide and 63mm long (total resistance is 5.2kΩ) zigzag around the flow channel. When the current around 83mA was applied on it, it can reach 85℃ (measure by Thermometer YS-1300K).

The fuel (2M CH3OH / 1M H2SO4 / H2O) was fed into anode, and (O2-sat. / 1M H2SO4 / H2O) was fed into cathode, operating under 80℃. The maximum power was reached around 0.992mW/cm2 at 5.16mA/cm2 (measure by DC Electronic Load 3310D series). Even through the power density is quite low compared with traditional DMFC, but it still can be used on specific applications.

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