目前微機電(MEMS)製程所使用的LIGA技術價格昂貴，且蝕刻製程造成環境污染，因此本論文嘗試開發出兼具環保及物理加工程序的製程設備供微細加工使用，以充實微機電製程技術。
本研究完成了以放電波形鑑別為控制基礎之微放電加工系統的設計與研製，在機構的設計上整合本實驗室研發的薄盤側推式超音波致動器，此種設備因為具有微米等級的步進能力，作為細線電極進給的驅動裝置，除可穩定達到電極進給的控制，同時也可解決一般微放電加工機更換電極的問題，簡化了微放電加工機構設計上的複雜性。

本論文開發的設備，在電路設計上有兩個特點：(一)自行開發出一組可依放電狀況適時調整放電休止時間的放電電路;(二)經由所設計的放電波形量測及處理電路，依據不同放電間隙電壓準位與電流的邏輯組合，結合可程式化的單晶片，完成一線上放電波形鑑別系統。此鑑別系統可計算引弧延遲時間平均值，精確辨識出Open、Spark、Arc及Short各種放電波形狀態，以此作為模糊控制的輸入變數，達到不須間隙量測感測器，而直接以放電參數為回授信號之閉迴路控制的微放電加工系統。

因為放電加工具有隨機性與非線性，所以本實驗在控制系統部分採用了兩個模糊控制器：(一)為控制電極進給的「振幅及脈寬調變間隙模糊控制器」，可依模糊推論選擇不同大小、作動頻率及脈寬的輸出命令，以維持電極進給速度與加工速度的平衡;(二)為「放電休止時間模糊控制器」，當放電極間環境惡化，可以調變放電休止時間，進而實現可控制放電能量及具有不良放電波抑制的微放電加工機制。

LIGA process in MEMS is at present expensive and has brought pollution problem. In this study, a novel device provides functions with environmental protection and being a physical process is developed to promote MEMS technology.
A micro EDM that is based on EDM waveform discrimination is researched and developed in this study. In this design, a thin-disc edge-driving ultrasonic actuator, which developed by our group, is used to drive thin wire electrode. This actuator, possessing micro stepping capability simplifies the design of the micro EDM system. Using this actuator as a driving element of thin wire electrode feeding mechanism, an action with non-interrupted electrode feeding is achieved.

This micro EDM device has a set of adjustable EDM circuits and an on-line EDM waveform discrimination system. The EDM waveform discrimination system with programmable chips can calculate the average spark delay time and provide useful electrical discharge (open-spark-arc-short) information according to logical combination between different levels of gap voltage and discharge current. The electrical discharge information thus obtained provides data as input parameters for the fuzzy controller. By this discrimination system, a closed loop controller without any sensor is obtained.

The control system consists of two fuzzy controllers. One is gap fuzzy controller with amplitude and pulse width modulation. This controller can follow fuzzy inference to select pulses of different amplitudes, active frequencies and duration periods to keep the balance of electrode feeding and machining rate. The other one is discharge off time fuzzy controller that can adjust discharge off time when the circumstance between electrode and workpiece is inadequate. With these two fuzzy controllers, a stable iso-energy micro EDM device is completed.

[1] 張渭川編譯, 放電加工的結構與實用技術, 全華科技圖書公司.
[2] 陳竹男, 放電加工原理和放電技術, 建宏書局.
[3] 傅建中, “放電加工機之放電波型監控模組設計,” 清華大學動機所
碩士論文, 民國85年六月.
[4] 葉人瑞, “CNC 放電加工機之間隙適應控制,” 清華大學動機所碩士
論文,民國86年六月.
[5] 郭榮芳, “側推式超音波馬達設計與測試,” 清華大學工程與系統科
學所碩士論文,民國89年六月.
[6] 歐陽敏盛, 顏吉永, 溫富亮 與 賴明宏, “順滑模態應用於超音波馬
達之追蹤控制,” 2001中華民國自動控制研討會.
[7] 張義芳 與 楊信生, “放電加工智慧型間隙控制器設計,” 中國機械
工程學會, 第14屆全國學術研討會論文集, 民國86年12月, 第
154~161頁.
[8] 張義芳, 石興銓 與 粘永峰, “放電加工之放電參數模糊控制,” 中
國機械工程學會, 第16屆全國學術研討會論文集, 民國88年12月, 第
350~357頁.
[9] 陳順同, “立式微小CNC綜合放電加工機之開發與微小3D零組件之製
造研究,” 國立雲林技術學院機械工程技術研究所碩士論文,民國86
年6月.
[10] 黃顯川編著, EM78447活用與實作, 高立圖書有限公司, (台北
2000).
[11] 王宜楷編著, 單晶片微控制器EM78447原理與實作, 宏友圖書有限公
司, (台北 1999).
[12] 劉銘中 與 張獻中著, EM78P447S微控制器原理與I/O應用, 儒林圖
書公司, (台北 2000).
[13] 周文得, “EDM間隙控制迴授變數的新選擇,” 國立交通大學控制工
程研究所碩士論文, 民國84年6月.
[14] 彭垂亞, “放電加工之波形判別與模糊控制設計,” 交通大學控制
所碩士論文, 民國83年六月.
[15] 吳正仲, “線切割放電加工之波列分析與應用,” 臺灣大學機械所
博士論文, 民國86年六月.
[16] 蒙以正著, MATLAB5專業設計計巧, 基峰資訊公司, (台北 2001).
[17] 廖運炫, “放電加工之發展趨勢與研究現況,” 機械月刊, 第二十
六卷第八期, 民國89年8月, 第374~387頁.
[18] T. Masaki , K. Kawata and T. Masuazwa,‘Micro Electro-
Discharge Machining and Its Application’ Proc.IEEE Int.
Conf. , 1990 , 21-26
[19] B.H. Tan, F.Y. Huang, H.M. Chow, J.Y. Tsai, “Micro-hole
machining of carbide by electric discharge machining,”
Journal of Materials Processing Technology , 1999, 139–
145.
[20] K. Furutani, T.Enami and N. Mohri, “Dot-matrix Electrical
Discharge Machining for Shaping Fine Structure”, Proc.
IEEE Int. Conf., 1997, 180-185.
[21] Z.Y. Yu, T. Masuzawa, M.Fujino, “Micro-EDM for Three
Dimensional Cavities (Development of Uniform Wear
Method), ” I.I.S., University of Tokyo, Japan, 1997.
[22] P. H. Heeren, D. Reynaerts, and H. V. Brussel, “Three-
dimensional Silicon Micro-Mechanical Parts Machining,”
IEEE ICAR’97 Monterey, CA, July 7-9, 1997, 247-252.
[23] D. Reynaerts, W. Meeusen, H.V. Brussel, “Machining of
Three-Dimensional Microstructures in Silicon by Discharge
Machining,” Sensors and Actuators, 1998, 159-165.
[24] K. Takahata, Y.B. Gianchandani, “Batch Mode Micro-EDM for
High-Density and High-throughput Micro-machining,” Proc.
IEEE Int. Conf., 2001.
[25] ZHAO Wansheng , LIU Weidong, WANG Zhenlong , MENG Qingguo
and LI Wenzhuo, “Research on Linear Stepper Ultrasonic
Motor and its Application,” Proc.IEEE Int. Conf.,
1999,679-682.
[26] H. Mortia, K. Furutani and N. Mohri, “Electric Discharge
Device with Direct Drive Method for Thin Wire Electric,”
Proc.IEEE Int. Conf., Robotics and Automation, Nagoya,
Japan, 1995, 73-78.
[27] R. Snoeys, D. Dauw and J. P. Kruth, “Survey of Adaptive
Control in Electro Discharge Machining,” Journal of
Materials Processing Technology, 1997, 112-119.
[28] A. Behrens, M.P. Witzak, “Integrating Fuzzy Technology in
EDM Process Control,” ISEM Proceedings, 1995, 287-294.
[29] Y. Xiong, S. Oi and S. Mao, “Fuzzy Pattern Recognition
and Fuzzy Control in EDM,” ISEM-9, 1986, PP.357-360.
[30] K.P. Rajurkar and W.M. Wang, “A New Model Reference
Adaptive Control of EDM,” Annals of the CIRP, Vol.38/1,
1989,pp.183-186.
[31] Y.F. Luo, “An Evaluation of Spark Mobility in Electrical
Discharge Machining,” IEEE, Vol. 26, No. 3, June, 1998.
[32] L. Ladicka, “Pulse Analysis and W-EDM Process
Identification,” Proceedings of the International
Symposium for Electro-Machining, ISEM-10, 1992, PP. 320-
331.
[33] Y.S. Tarng, C.M. Tseng, and L.K. Chung, “A fuzzy pulse
discriminating system for electrical discharge
machining,” Journal of Mechanical Tools Manufacturing,
1997, 511-522.
[34] J.Y. Kao and Y.S. Tarng, “A neutral-network approach for
the on-line monitoring of the electrical discharge
machining process,” Journal of Materials Processing
Technology, 1997, 112-119.
[35] S. Kher and A. Dua, “EDM pulse control : A design
approach,” SICE’99 Morioka, July 28-30, 1999, 1047-1052.
[36] S.F. Yu, B,Y. Lee and W.S. Lin, “Waveform Monitoring of
Electrical Discharge Machining by Wavelet Transform,” Int
J Adv Manuf Technol 2001, 339–343.
[37] L.A. Zadeh and R. Jang, “Fuzzy Logic Toolbox User's
Guide -- for Use with Matlab,” Version 3.0, The
MathWorks, Inc., (Mass. 1998).
[38] T.B. Thoe, D.K. Aspinwall, N. Killey, “Combined
ultrasonic and electrical discharge machining of Ceramic
coated nickel alloy,” Journal of Materials Processing
Technology , 1999, 323-328.
[39] J.L. Lin, K.S. Wang, B.H. Yan, Y.S. Tarng, “Optimization
of the electrical discharge machining process based on the
Taguchi method with fuzzy logics,” Journal of Materials
Processing Technology, 2000, 48-55.
[40] T. Magara, K. Kobayashi and T. Yatomi, “Micro-Finishing
by High Frequency AC Source in Wire EDM,” ISEM 9, 1989,
PP.76-79.
[41] M. Yoshida and M. Kunieda, “Measurement of Machining Gap
in EDM in Air,” Proc. of Annual Meeting of JSEME, 1997,
PP. 75-78(in Japanese).
[42] S.L. Chen, B.H. Yan, F.Y. Huang, “Influence of Kerosene
and Distrilled Water as Dielectrics on The Electric
Discharge Machining Characteristics of Ti-6Al-4V,”Journal
of Materials Processing Technology, 1997, 107-111.