本論文主要為研究垂直梳狀致動微掃瞄鏡之角度定位控制，並以梳狀電極間的電容值當做回授控制訊號。由於垂直梳狀電極結構的電容值對扭轉角度的關係難以用電磁學基本理論推導出其解析解，故本文採用ANSYS模擬計算單位長度電容值，然後透過幾何積分的方式推導出電容對扭轉角度之函數關係。求得電容對扭轉角度的函數之後，直接考慮垂直梳狀致動微掃瞄鏡的二階動態系統，以SIMULINK建立微掃瞄鏡系統。由於此系統為非線性系統，所以首先以狀態回授方式將系統線性化，並針對此線性化系統設計PID控制器以達微掃瞄鏡扭轉角控制之性能要求。經由理論分析控制器的設計並透過SIMULINK模擬驗證控制器的可行性。

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