近年來各先進國家為提升製造業競爭力，積極的朝智慧化製造、生產以及即時反應方向努力，並提出了許多相關政策，例如：美國『再工業化政策』、德國『工業4.0』、日本『人機共存未來工廠』、韓國『下世代智慧型工廠』、中國『製造2025計畫』，因此製造產業自動化、智慧化顯得格外重要。
本實驗室致力於雷射干涉微影系統開發已有一段時間，除了製造出不同結構的系統設計之外，本實驗室也開發了許多提升曝光穩定度以及良率之系統，例如：雷射平坦化系統、消色差曝光系統、光形監控系統、多光束系統、旋轉莫爾條紋缺陷消除系統等等，但卻沒有一個能完整整合各項感測器且穩定的系統。為了能夠因應智慧化科技以及提升雷射干涉微影系統之良率，同時減少人力的耗費，本研究主旨在重新設計穩定機台並即時擷取影響微影結果之相關因素，將實驗與結果數據化。
本研究將藉由多項感測器設計可以即時擷取相關數據之雷射干涉微影機台，本研究將光傳感器、加速規、Beam profiler、溫度感測器等感測器整合至雷射干涉微影系統中，將會影響結果之因素數據化，使在實驗過程能即時收集相關數據，以利未來進行歸納分析，並同時達到無須專人隨時在旁監控實驗情況，同時能即呈現給使用者。

In recent years, in order to enhance the competitiveness of manufacturing industries, the advanced countries have actively engaged in intelligent manufacturing, production, and immediate response, and have put forward many related policies, such as the US "Re-industrialization Policy", Germany "Industry 4.0", and Japan "The man-machine coexistence of the future factory", South Korea "next generation of smart factory", and China "manufacturing 2025 ", so the manufacturing industry automation and intelligence is particularly important.
Our laboratory has been working on the development of laser interference lithography systems for a while. In addition to manufacturing system designs with different structures, our lab has also developed many systems to improve exposure stability and yield, such as laser flatness system, achromatic exposure system, light shape monitoring system, multi-beam system, rotating moiré stripe defect elimination system, etc. But there is no stable system that fully integrates the sensors. In order to respond to intelligent technology , improve the yield of laser interference lithography system and reducing the labor cost, the main purpose of this research is to redesign a stable machine and immediately capture the relevant factors affecting the lithography results, and to digitize the experiment and results. .
In our research, we will redesign a laser interference lithography machine which can capture relevant data by multiple sensors. Sensors such as light-power sensors, accelerometers, Beam profiler, and temperature sensors will be used in our system. Also, the factors affecting the results will be digitized, so that relevant data can be collected in the experimental process in time for the inductive analysis in the future, and it is possible to monitor the experiment without any need for the person at any time, and at the same time, it can be presented to the user.

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