在本論文中描述矽微光譜儀的設計、製作及量測，光譜儀不論在科學、工業及消費性產品上都被廣泛地應用，而本論文的目的即是利用微機電系統的技術來開發積體化的微光譜儀，如此便可利用已成熟的半導體製程的優點：批次量產、微小化、低成本。
矽微光譜儀利用十六組不同共振腔長度的Fabry-Perot etalons(FPE)，來達到過濾十六個波道的可見光，並配合Lateral PIN Photodetector來達成直接將光訊號轉換成電訊號；而在FPE的結構上是採用空氣為共振腔，並以銀分別為二個部份穿透的鏡面，而為了達到不同長度的共振腔，本論文利用二氧化矽薄膜為材質的微橋式結構會有出平面變形的特性，設計十六個不同長度的微橋式結構來達到不同高度的出平面變形，進而帶動低應力氧化矽薄膜與銀組成的鏡面，再與鍍上銀反射面的光偵測器組成FPE；完成的矽微光譜儀的面積為8.8mm×8.8mm，操作範圍為400nm至700nm。

In this paper, we describe a novel integrated array type microspectrometer based on Fabry-Perot etalons. The spectral analysis of visible light is achieved by an array of Fabry-Perot etalons with different resonance gaps. Each resonance gap is determined by the central deflection of prebuckled bridge when it is in the down position. In this design, the microspectrometer has 16-channels, each channel only allows one single peak of narrow wavelength band to pass. The fabrication of 16-channel can be done with only one lithography process without N subsequent etching steps. An array of photodetectors is also integrated beneath the Fabry-Perot etalons to form the microspectrometer.

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