本論文利用微機電技術，設計與製造一種新式的微型雙軸定位平台。過去的雙軸平台因為受限於致動方式先天上的缺點，使得結構設計與製程趨於複雜，而本研究提出的新式雙軸平台提出使用具有良好運動特性的勞侖茲力致動器，搭配弧形彈簧與一維耦合的機構設計，即可達到雙軸解耦合的運動；製程方面則使用磊晶矽晶圓搭配電化學蝕刻停止技術，相較過去大部分製程使用SOI晶圓，此方式能有效降低成本，且不需要使用或組裝特殊的材料，具有製程整合上的優勢。本文中也針對平台的基本操作原理與特性進行模擬與推導，並對元件量測進行載具的製作與完整的實驗規劃，最後也將量測結果與先前的研究作比較，顯示此元件具有優秀的運動特性，包括大位移輸出、高結構剛性、良好的解耦合能力與快速的響應速度，而未來也將持續的往系統整合的目標邁進。

This thesis demonstrates the design, fabrication and characteristics of a novel 2-axis microstage. The stage is supported by curved-beam spring and driven by two Lorentz force actuators. By modulating the magnitude and direction of the linear actuators, the stage can perform 2-axis in-plane motions. The microstage has two merits: (1) Lorentz force actuator with snap-through characteristic to enlarge the microstage displacement, (2) curved-beam spring to enable the 2-axis positioning. Measurements show the typical microstage has a planar size of 3mm□3mm with output displacements of ±13 μm in X and Y-axis. Also, the decoupled capability (<2~10%) and dynamic response time (<20ms) are presented in this thesis.

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